Dr. Peter B. Bjoernangen Profile

Dr. Peter B. Bjoernangen

R&D Engineer at Mycronic AB

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Author

Publications (5)

Proceedings Article | 7 March 2014 Paper

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt, Ulrike Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, Torbjorn Sandstrom

Proceedings Volume 8977, 89770O (2014) https://doi.org/10.1117/12.2036533

KEYWORDS: Spatial light modulators, Mirrors, Modulation, Imaging systems, Copper, Electrodes, Silica, Laser applications, Semiconductor lasers, Laser processing

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Proceedings Article | 19 February 2009 Paper

Advances in SLM development for microlithography

Ulrike Dauderstädt, Per Askebjer, Peter Björnängen, Peter Dürr, Martin Friedrichs, Matthias List, Dirk Rudloff, Jan-Uwe Schmidt, Michael Müller, Michael Wagner

Proceedings Volume 7208, 720804 (2009) https://doi.org/10.1117/12.810787

KEYWORDS: Mirrors, Spatial light modulators, Electrodes, Optical lithography, Micromirrors, Laser systems engineering, Actuators, Aluminum, Deep ultraviolet, Dielectrics

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Proceedings Article | 30 October 2007 Paper

Contrast properties of spatial light modulators for microlithography

J. Heber, D. Kunze, P. Dürr, D. Rudloff, M. Wagner, P. Björnängen, J. Luberek, U. Berzinsh, T. Sandström, T. Karlin

Proceedings Volume 6730, 673035 (2007) https://doi.org/10.1117/12.747015

KEYWORDS: Mirrors, Micromirrors, Optical lithography, Diffraction, Reflectivity, Photomasks, Microelectromechanical systems, Surface roughness, Deep ultraviolet, Microopto electromechanical systems

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Proceedings Article | 28 May 2004 Paper

DOE manufacture with the DUV SLM-based Sigma7300 laser pattern generator

Peter Björnängen, Mats Ekberg, Thomas Öström, Hans Fosshaug, Johan Karlsson, Charles Björnberg, Fredrik Nikolajeff, Mikael Karlsson

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.535767

KEYWORDS: Diffractive optical elements, Diffraction, Spatial light modulators, Manufacturing, Optics manufacturing, Phase shift keying, Quartz, Refractive index, Photomasks, Stray light

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Proceedings Article | 28 May 2004 Paper

Airborne molecular contamination control in the micromirror SLM-based deep ultraviolet DUV SIGMA7300 laser pattern generator

Mats Ekberg, Hans Fosshaug, Thomas Ostrom, Peter Bjornangen, Thomas Utterback, Per-Uno Skotte, John Higley, David Ruede, Oleg Kishkovich

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.535833

KEYWORDS: Photomasks, Deep ultraviolet, Molecules, Chemical analysis, Climatology, Molecular lasers, Spatial light modulators, Contamination, Optical components, Contamination control

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