Dr. Peter Dürr Profile

Dr. Peter Dürr

senior scientist at Fraunhofer-Institut for Photonic Microsystems IPMS

SPIE Involvement:

Author

Area of Expertise:

micro optics , spatial light modulators

Websites:

Company Website

Publications (27)

Proceedings Article | 9 April 2024 Presentation + Paper

MEMS-on-CMOS integration of a holographic 8M-pixel SLM device using KrF-lithography

S. Döring, P. Recknagel, C. Hohle, P. Dürr

Proceedings Volume 12958, 1295809 (2024) https://doi.org/10.1117/12.3010154

KEYWORDS: Actuators, Optical lithography, Spatial light modulators, Lithography, Semiconducting wafers, Overlay metrology, Holography, Microelectromechanical systems, Reactive ion etching, Micromirrors

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Proceedings Article | 12 March 2024 Paper

Novel reflective SLM in real holographic 3D HUD displays and their impact on quality

Norbert Leister, Tim Wagner, Tobias Schuster, Martin Teich, Steffen Zozgornik, Hagen Stolle, Sara Francés González, Peter Duerr

Proceedings Volume 12913, 1291303 (2024) https://doi.org/10.1117/12.3001348

KEYWORDS: Heads up displays, Holography, Holograms, Mirrors, Spatial light modulators, Simulations, Crosstalk

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Proceedings Article | 12 March 2024 Presentation + Paper

Characterization of MEMS piston mirror arrays with comb drive actuator

S. Francés González, M. Nitzsche, A. Bajpai, A. Pranti, A. Neudert, P. Duerr

Proceedings Volume 12899, 128990D (2024) https://doi.org/10.1117/12.3000871

KEYWORDS: Actuators, Mirrors, Design, Simulations, Spatial light modulators, Micromirrors, Holographic displays, Microelectromechanical systems, Holography, Fabrication

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Proceedings Article | 12 July 2023 Open Access

Super-resolved compressive demonstrator for Earth Observation applications in the Medium Infrared: instrumental concept, optical design and expected performances

Valentina Raimondi, Massimo Baldi, Dirk Berndt, Tiziano Bianchi, Guzmán Borque Gallego, Donato Borrelli, Roberto Carlà, Chiara Corti, Francesco Corti, Marco Corti, Ulrike Dauderstädt, Peter Dürr, Andrea Gonnelli, Sara Francés González, Donatella Guzzi, Demetrio Labate, Nicolas Lamquin, Cinzia Lastri, Enrico Magli, Emiliano Marzi, Vanni Nardino, Christophe Pache, Lorenzo Palombi, Giuseppe Pilato, Enrico Suetta, Diego Valsesia, Michael Wagner

Proceedings Volume 12777, 1277741 (2023) https://doi.org/10.1117/12.2690634

KEYWORDS: Reconstruction algorithms, Image restoration, Image compression, Digital micromirror devices, Equipment, Infrared radiation, Spatial light modulators, Interfaces, Channel projecting optics, Super resolution

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Proceedings Article | 12 July 2023 Open Access

Towards a spatial light modulator technology for space applications: performance analysis under the environmental conditions

Sara Francés González, Dirk Berndt, Guzmán Borque Gallego, Donato Borrelli, Ulrike Dauderstädt, Peter Dürr, Markus Eckert, Jörg Heber, Detlef Kunze, Christophe Pache, Giuseppe Pilato, Valentina Raimondi, Enrico Suetta, Hannes Torlee, Antoine Ummel, Michael Wagner

Proceedings Volume 12777, 127773U (2023) https://doi.org/10.1117/12.2690567

KEYWORDS: Vacuum chambers, Temperature metrology, Spatial light modulators, Vibration, Mirrors, Micromirrors, Vacuum, Astronomical imaging, Aerospace engineering, Windows

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Proceedings Article | 15 March 2023 Poster + Paper

FEM simulations to optimize a micro mirror array package for a wide operating temperature range

Sreevidya Guru, Peter Duerr, Alexander Mai

Proceedings Volume 12434, 124340S (2023) https://doi.org/10.1117/12.2647680

KEYWORDS: Spatial light modulators, Beam combiners, Glues, Simulations, Packaging, Temperature metrology, Microelectromechanical systems, Finite element methods, Windows, Micromirrors

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Proceedings Article | 15 March 2023 Poster + Paper

Improved comb drive design for MEMS piston mirror arrays

Mario Nitzsche, Peter Duerr, Andreas Neudert

Proceedings Volume 12434, 124340R (2023) https://doi.org/10.1117/12.2649743

KEYWORDS: Actuators, Design and modelling, Simulations, Mirrors, Microelectromechanical systems, Spatial light modulators, Lithography, Crosstalk, Computer generated holography, Electrodes

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Proceedings Article | 20 May 2022 Presentation + Paper

Compressive sensing instrumental concepts for space applications

Valentina Raimondi, Massimo Baldi, Dirk Berndt, Tiziano Bianchi, Guzmán Borque Gallego, Donato Borrelli, Chiara Corti, Francesco Corti, Marco Corti, Ulrike Dauderstädt, Peter Dürr, Andrea Gonnelli, Sara Francés González, Donatella Guzzi, Detlef Kunze, Demetrio Labate, Nicolas Lamquin, Cinzia Lastri, Enrico Magli, Emiliano Marzi, Vanni Nardino, Christophe Pache, Lorenzo Palombi, Giuseppe Pilato, Enrico Suetta, Diego Valsesia, Michael Wagner

Proceedings Volume 12136, 121360B (2022) https://doi.org/10.1117/12.2625305

KEYWORDS: High resolution satellite images, Spatial light modulators, Sensors, Micromirrors, Compressed sensing, Data acquisition, Super resolution, Aerospace engineering, Modulation, Image compression, Infrared radiation

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Proceedings Article | 2 March 2022 Presentation + Paper

MEMS piston mirror arrays for computer generated holography

P. Dürr, A. Neudert, M. Nitzsche, C. Hohle, H. Stolle, J. Pleikies

Proceedings Volume 12013, 1201306 (2022) https://doi.org/10.1117/12.2608081

KEYWORDS: Actuators, Mirrors, Spatial light modulators, Microelectromechanical systems, Computer generated holography, Holography, Micromirrors, 3D displays, Finite element methods, Mixed reality

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Proceedings Article | 28 February 2020 Paper

Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform

A. Gehner, S. Döring, D. Rudloff, D. Kunze, P. Dürr, S. Francés, L. Hänsel, H. Torlee, A. Elgner, M. Eckert, M. Friedrichs, J. Heber, J. Schmidt, W. Pufe, C. Hohle, M. Schulze, M. Wagner

Proceedings Volume 11293, 1129302 (2020) https://doi.org/10.1117/12.2543052

KEYWORDS: Mirrors, Actuators, Micromirrors, Optical lithography, Calibration, Analog electronics, CMOS technology

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Proceedings Article | 4 March 2019 Paper

MEMS piston mirror arrays with force-balanced single spring

P. Dürr, A. Neudert, D. Kunze, M. Friedrichs

Proceedings Volume 10931, 1093104 (2019) https://doi.org/10.1117/12.2507007

KEYWORDS: Diffractive optical elements, Actuators, Spatial light modulators, Finite element methods, Micromirrors, Modulation, Electrodes, Microelectromechanical systems, Computer generated holography

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Proceedings Article | 7 March 2014 Paper

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt, Ulrike Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, Torbjorn Sandstrom

Proceedings Volume 8977, 89770O (2014) https://doi.org/10.1117/12.2036533

KEYWORDS: Spatial light modulators, Mirrors, Modulation, Imaging systems, Copper, Electrodes, Silica, Laser applications, Semiconductor lasers, Laser processing

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Proceedings Article | 5 February 2010 Paper

Temperature measurement on MOEMS micromirror plates under illumination

Ingo Wullinger, Dirk Rudloff, Klaus Lukat, Peter Dürr, Mathias Krellmann, Detlef Kunze, Aravind Narayana Samy, Ulrike Dauderstädt, Michael Wagner

Proceedings Volume 7592, 75920P (2010) https://doi.org/10.1117/12.842066

KEYWORDS: Mirrors, Temperature metrology, Convection, Micromirrors, Microopto electromechanical systems, Resistors, Calibration, Resistance, Photonic microstructures, Microsystems

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Proceedings Article | 19 February 2009 Paper

Advances in SLM development for microlithography

Ulrike Dauderstädt, Per Askebjer, Peter Björnängen, Peter Dürr, Martin Friedrichs, Matthias List, Dirk Rudloff, Jan-Uwe Schmidt, Michael Müller, Michael Wagner

Proceedings Volume 7208, 720804 (2009) https://doi.org/10.1117/12.810787

KEYWORDS: Mirrors, Spatial light modulators, Electrodes, Optical lithography, Micromirrors, Laser systems engineering, Actuators, Aluminum, Deep ultraviolet, Dielectrics

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SPIE Journal Paper | 1 April 2008

Charging effects in micromirror spatial light modulators

Ulrike Dauderstädt, Peter Duerr, Steffen Sinning, Ingo Wullinger, Michael Wagner

JM3, Vol. 7, Issue 02, 021011, (April 2008) https://doi.org/10.1117/12.10.1117/1.2911021

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Deep ultraviolet, Oxides, Actuators, Analog electronics, Titanium, Silicon

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Proceedings Article | 30 October 2007 Paper

Contrast properties of spatial light modulators for microlithography

J. Heber, D. Kunze, P. Dürr, D. Rudloff, M. Wagner, P. Björnängen, J. Luberek, U. Berzinsh, T. Sandström, T. Karlin

Proceedings Volume 6730, 673035 (2007) https://doi.org/10.1117/12.747015

KEYWORDS: Mirrors, Micromirrors, Optical lithography, Diffraction, Reflectivity, Photomasks, Microelectromechanical systems, Surface roughness, Deep ultraviolet, Microopto electromechanical systems

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Proceedings Article | 19 January 2007 Paper

Charging effects in spatial light modulators based on micromirrors

Ulrike Dauderstädt, Thor Bakke, Peter Dürr, Steffen Sinning, Ingo Wullinger, Michael Wagner, Hubert Lakner

Proceedings Volume 6463, 64630J (2007) https://doi.org/10.1117/12.700331

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Oxides, Deep ultraviolet, Micromirrors, Actuators, Titanium, Silicon, Aluminum

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Proceedings Article | 23 January 2006 Paper

Micro-actuator with extended analog deflection at low drive voltage

Peter Dürr, Andreas Gehner, Jan Schmidt, Detlef Kunze, Michael Wagner, Hubert Lakner

Proceedings Volume 6114, 61140I (2006) https://doi.org/10.1117/12.645826

KEYWORDS: Actuators, Electrodes, Mirrors, Capacitors, Analog electronics, Electronics, Finite element methods, Chemical elements, Safety, Electromagnetism

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Proceedings Article | 22 January 2005 Paper

Mechanical stability of spatial light modulators in microlithography

Ulrike Dauderstadt, Peter Duerr, Ulric Ljungblad, Tord Karlin, Harald Schenk, Hubert Lakner

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590082

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Optical lithography, Laser development, Metals, Microopto electromechanical systems, Photomasks, Titanium

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Proceedings Article | 24 January 2004 Paper

Application of spatial light modulators for microlithography

Ulrike Dauderstaedt, Peter Duerr, Tord Karlin, Harald Schenk, Hubert Lakner

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.528798

KEYWORDS: Mirrors, Spatial light modulators, Deep ultraviolet, Laser development, Electrodes, Optical lithography, Micromirrors, Microopto electromechanical systems, Metals, Laser systems engineering

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Proceedings Article | 20 January 2003 Paper

Operation of spatial light modulators in DUV light

Ulrike Dauderstaedt, Peter Duerr, Mathias Krellmann, Tord Karlin, Uldis Berzinsh, Lars Leonardsson, Horst Wendrock

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477805

KEYWORDS: Electrodes, Mirrors, Spatial light modulators, Titanium, Deep ultraviolet, Ultraviolet radiation, Oxides, Laser development, Aluminum, Oxygen

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Proceedings Article | 20 January 2003 Paper

Characterization of spatial light modulators for microlithography

Peter Duerr, Ulrike Dauderstaedt, Detlef Kunze, Marine Auvert, Thor Bakke, Harald Schenk, Hubert Lakner

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477803

KEYWORDS: Spatial light modulators, Cameras, Lithography, Mirrors, Calibration, Deep ultraviolet, Electrodes, Analog modulation, Reflectivity, Spatial filters

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Proceedings Article | 2 October 2001 Paper

Design and fabrication of micromirror arrays for UV lithography

Hubert Lakner, Peter Duerr, Ulrike Dauderstaedt, Wolfgang Doleschal, Joerg Amelung

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443094

KEYWORDS: Mirrors, Spatial light modulators, Micromirrors, Photomasks, Electrodes, Lithography, Ultraviolet radiation, Analog electronics, Modulation, Scanning electron microscopy

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Proceedings Article | 22 January 2001 Paper

New architecture for laser pattern generators for 130 nm and beyond

Ulric Ljungblad, Torbjoern Sandstrom, Hans Buhre, Peter Duerr, Hubert Lakner

Proceedings Volume 4186, (2001) https://doi.org/10.1117/12.410691

KEYWORDS: Spatial light modulators, Reticles, Mirrors, Photomasks, Laser applications, Analog electronics, Semiconducting wafers, Laser systems engineering, Microelectronics, Micromirrors

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Proceedings Article | 22 August 2000 Paper

Test system for micromirror arrays

Peter Duerr, Thomas Tanneberger, Alexander Wolter, Wolfram Kluge, Wolfgang Doleschal, Hubert Lakner

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396507

KEYWORDS: Spatial light modulators, Mirrors, Aluminum, Interferometers, Micromirrors, Charge-coupled devices, Electrodes, Transistors, Image segmentation, Edge detection

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Proceedings Article | 22 August 2000 Paper

Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors

Harald Schenk, Peter Duerr, Detlef Kunze, Hubert Lakner, Heinz Kueck

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396479

KEYWORDS: Mirrors, Scanners, Silicon, Micromirrors, Crystals, Measurement devices, Design and modelling, Finite element methods, Modal analysis, Cerium

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Proceedings Article | 2 September 1999 Paper

Micromirrors for direct writing systems and scanners

Hubert Lakner, Wolfgang Doleschal, Peter Duerr, Andreas Gehner, Harald Schenk, Alexander Wolter, Guenter Zimmer

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361264

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Actuators, Silicon, Scanners, Diffraction gratings, Liquids, Diffraction

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Showing 5 of 27 publications

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