Dr. Peter Weissbrodt Profile

Dr. Peter Weissbrodt

Vice President Microoptics at JENOPTIK Optical Systems GmbH

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Author

Publications (18)

Proceedings Article | 6 February 2008 Paper

Grayscale homogenizers in calcium fluoride

Jeffrey Lawrence, Lamarr Simmons, Andrew Stockham, John Smith, Gregg Borek, Matthias Cumme, Roman Kleindienst, Peter Weissbrodt

Proceedings Volume 6883, 68830O (2008) https://doi.org/10.1117/12.767531

KEYWORDS: Etching, Diffusers, Binary data, Microlens array, Semiconducting wafers, Calcium, Photoresist materials, Ions, Photomasks, Optics manufacturing

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Proceedings Article | 7 March 2007 Paper

Challenging micro-optical applications demand diverse manufacturing solutions

Gregg Borek, Peter Weissbrodt, Manfred Schrenk, Matthias Cumme

Proceedings Volume 6462, 64620X (2007) https://doi.org/10.1117/12.715022

KEYWORDS: Optics manufacturing, Optical components, Optical lithography, Near field optics, Micro optics, Manufacturing, Chemical elements, Lithography, Electron beam lithography, Photomasks

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Proceedings Article | 15 October 2005 Paper

Combined elements for beam shaping and polarization management

Matthias Cumme, Peter Triebel, Dirk Mademann, Manfred Schrenk, Peter Weissbrodt

Proceedings Volume 5962, 59621B (2005) https://doi.org/10.1117/12.625206

KEYWORDS: Beam shaping, Polarization, Optical components, Near field optics, Polarizers, Optical testing, Near field, Lithographic illumination, Silica, Binary data

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Proceedings Article | 12 May 2005 Paper

Polarization gratings for the DUV: modeling and experimental results

P. Triebel, D. Mademann, M. Schrenk, P. Weissbrodt

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598724

KEYWORDS: Polarization, Diffraction gratings, Dielectric polarization, Diffraction, Multiplexing, Optical properties, Deep ultraviolet, Optical design, Chemical elements, Binary data

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Proceedings Article | 12 May 2005 Paper

Hot spot free diffractive DUV-homogenizer for high NA-illumination

Matthias Cumme, Mirko Riethmuller, Dirk Mademann, Manfred Schrenk, Peter Weissbrodt

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598731

KEYWORDS: Diffractive optical elements, Beam shaping, Near field, Lithographic illumination, Silica, Optical alignment, Diffraction, Inspection, Lithography, Control systems

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Proceedings Article | 15 September 2004 Paper

Propagation effects of surface waves on periodic chromium structures

Peter Triebel, Peter Weissbrodt, Stefan Nolte, Andreas Tunnermann

Proceedings Volume 5450, (2004) https://doi.org/10.1117/12.545610

KEYWORDS: Chromium, Wave propagation, Surface plasmons, Interfaces, Silica, Finite-difference time-domain method, Near field optics, Metals, Waveguides, Near field

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Proceedings Article | 24 May 2004 Paper

Application of the rigorous treatment for the characterization of sub-micron structures on photomasks

Peter Triebel, Peter Weissbrodt, Stefan Nolte, Ernst Kley, Andreas Tuennermann

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536311

KEYWORDS: Chromium, Photomasks, Reflection, Surface plasmons, Critical dimension metrology, Oxides, Polarization, Visible radiation, Scanning electron microscopy, Dielectric polarization

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Proceedings Article | 2 June 2003 Paper

Characterization of transparent quarter micron lines by spectral measurements with visible light

Peter Triebel, Peter Weissbrodt, Stefan Nolte, Andreas Tuennermann

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.482799

KEYWORDS: Diffraction gratings, Binary data, Diffraction, Visible radiation, Chromium, Polarization, Optical testing, Scanning electron microscopy, Optical properties, Silica

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Proceedings Article | 10 December 2001 Paper

Degradation of supersmooth surfaces for UV/EUV/x-ray applications in space

Dirk-Roger Schmitt, Helmut Toebben, Gabriele Ringel, Peter Weissbrodt, Manfred Schrenk, L. Raupach, Erich Hacker

Proceedings Volume 4498, (2001) https://doi.org/10.1117/12.450075

KEYWORDS: Space operations, Silver, Aerospace engineering, Resistance, Space telescopes, Satellites, Oxygen, Ultraviolet radiation, Contamination, X-rays

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Proceedings Article | 27 May 1996 Paper

Review of structural influences on the laser damage thresholds of oxide coatings

Erich Hacker, Hans Lauth, Peter Weissbrodt

Proceedings Volume 2714, (1996) https://doi.org/10.1117/12.240376

KEYWORDS: Optical coatings, Crystals, Oxygen, Contamination, Laser damage threshold, Polishing, Oxides, Resistance, Absorption, Laser induced damage

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Proceedings Article | 27 May 1996 Paper

248-nm laser interaction studies on MgF2/LaF3 optical coatings by mass spectroscopy and x-ray photoelectron spectroscopy

Axel Bodemann, Norbert Kaiser, L. Raupach, Peter Weissbrodt, Erich Hacker

Proceedings Volume 2714, (1996) https://doi.org/10.1117/12.240361

KEYWORDS: Contamination, Optical coatings, Excimer lasers, Mass spectrometry, Oxygen, Multilayers, Mirrors, X-rays, Photoemission spectroscopy, Chemical analysis

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Proceedings Article | 14 July 1995 Paper

Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers

Norbert Kaiser, Bernhard Anton, H. Jaenchen, Klaus Mann, Eric Eva, C. Fischer, Rainer Henking, Detlev Ristau, Peter Weissbrodt, Dirk Mademann, L. Raupach, Erich Hacker

Proceedings Volume 2428, (1995) https://doi.org/10.1117/12.213762

KEYWORDS: Laser damage threshold, Excimer lasers, Lanthanum, Pulsed laser operation, Chemical analysis, Magnesium fluoride, Crystals, Absorption, Contamination, Dielectrics

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Proceedings Article | 4 November 1994 Paper

Pulsed-laser deposition of x-ray optical layer stacks with atomically flat interfaces

Hermann Mai, Reiner Dietsch, Thomas Holz, S. Voellmar, S. Hopfe, Roland Scholz, Peter Weissbrodt, Rhena Krawietz, B. Wehner, H. Eichler, H. Wendrock

Proceedings Volume 2253, (1994) https://doi.org/10.1117/12.192079

KEYWORDS: Interfaces, Multilayers, Thin films, X-rays, X-ray optics, Particles, Silicon, Nickel, Molybdenum, X-ray diffraction

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Proceedings Article | 4 November 1994 Paper

Coatings in space: ground- and space-based stability investigations

Erich Hacker, Peter Weissbrodt, L. Raupach, Hans Lauth, Heiner Kappel, Sigrid Wagner, Dirk-Roger Schmitt

Proceedings Volume 2253, (1994) https://doi.org/10.1117/12.192087

KEYWORDS: Contamination, Optical coatings, Bidirectional reflectance transmission function, Fluorine, Oxygen, Statistical analysis, Scattering, Ultraviolet radiation, Space operations, Natural surfaces

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Proceedings Article | 4 November 1994 Paper

Secondary neutral mass spectrometry (SNMS) depth profile analysis of optical coatings

Peter Weissbrodt, Dirk Mademann, Erich Hacker

Proceedings Volume 2253, (1994) https://doi.org/10.1117/12.192139

KEYWORDS: Optical coatings, Ions, Chemical analysis, Electrons, Plasma, Multilayers, Profiling, Statistical analysis, Nickel, Thin film coatings

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Proceedings Article | 30 September 1994 Paper

Improved method for contamination control during fabrication of space equipment

Peter Weissbrodt, L. Raupach, Erich Hacker

Proceedings Volume 2210, (1994) https://doi.org/10.1117/12.188127

KEYWORDS: Contamination, Infrared spectroscopy, Contamination control, Natural surfaces, Spectroscopy, Optical coatings, Infrared radiation, Quartz, X-rays, Photoemission spectroscopy

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Proceedings Article | 30 September 1994 Paper

Space stability investigations of optical coatings by earth- and space-based experiments

Erich Hacker, Peter Weissbrodt, L. Raupach, Hans Lauth, Heiner Kappel, Sigrid Wagner, Dirk-Roger Schmitt

Proceedings Volume 2210, (1994) https://doi.org/10.1117/12.188107

KEYWORDS: Contamination, Fluorine, Coating, Oxygen, Statistical analysis, Scattering, Ultraviolet radiation, Optical coatings, Bidirectional reflectance transmission function, Natural surfaces

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Proceedings Article | 30 September 1994 Paper

Ultroviolet (UV)- and thermal-stability of absorbing coatings for space instrumentation

Peter Weissbrodt, L. Raupach, Erich Hacker, Sigrid Wagner, Heiner Kappel

Proceedings Volume 2210, (1994) https://doi.org/10.1117/12.188129

KEYWORDS: Contamination, Optical coatings, Silicon, Aerospace engineering, Optical components, Natural surfaces, Carbon, Molecules, Absorption, Oxygen

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Showing 5 of 18 publications

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