Dr. Philippe Bandelier Profile

Dr. Philippe Bandelier

at CEA-LETI

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Publications (2)

Proceedings Article | 7 March 2008 Paper

Contrast management of 193i interferometry to be close to scanners contrast conditions

Alexandre Lagrange, Philippe Bandelier, Christelle Charpin, Olivier Lartigue

Proceedings Volume 6924, 69242G (2008) https://doi.org/10.1117/12.772584

KEYWORDS: Nanoimprint lithography, Critical dimension metrology, Interferometers, Scanners, Interferometry, Lithography, Image processing, Photoresist materials, Modulation, Semiconducting wafers

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Proceedings Article | 21 March 2006 Paper

Liquid immersion lithography at 193 nm using a high-NA achromatic interferometer

Anne-Laure Charley, Alexandre Lagrange, Olivier Lartigue, Philippe Bandelier, Marianne Derouard, Patrick Schiavone

Proceedings Volume 6154, 61541Z (2006) https://doi.org/10.1117/12.654404

KEYWORDS: Polarization, Interferometers, Line edge roughness, Line width roughness, Diffraction gratings, Diffraction, Interferometry, Printing, Photoresist materials, Liquids

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