Prof. Ping-Hei Chen Profile

Prof. Ping-Hei Chen

Professor at National Taiwan Univ

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Author

Publications (5)

Proceedings Article | 1 September 2005 Paper

Development of a novel real-time PCR machine

D. Lee, J. Chien, M. Wu, P. Chen

Proceedings Volume 5864, 58640R (2005) https://doi.org/10.1117/12.633056

KEYWORDS: Luminescence, Prototyping, Fluorescence spectroscopy, Capillaries, Spectroscopy, Xenon, Light sources, Fluctuations and noise, Sensors, Target detection

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Proceedings Article | 16 August 2004 Paper

Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

Chi-Yuan Lee, Tsung-Tsong Wu, Yung-Yu Chen, Ying-Chou Cheng, Wen-Jong Chen, Shih-Yung Pao, Pei-Zen Chang, Ping-Hei Chen, Kai-Hsiang Yen, Fu-Yuan Xiao

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544959

KEYWORDS: Silicon, Acoustics, Wet etching, Zinc oxide, Wave sensors, Etching, Microelectromechanical systems, Liquids, Sensors, Transducers

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Proceedings Article | 16 August 2004 Paper

Fabrication of micro-optical switch by post-CMOS micromachining process

Ying-Chou Cheng, Chi-Yuan Lee, Ching-Liang Dai, Wen-Jong Chen, Pei-Zen Chang, Ping-Hei Chen

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545307

KEYWORDS: Micromirrors, Switches, Mirrors, Switching, Etching, Micromachining, Silica, Demultiplexers, Metals, Microelectromechanical systems

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Proceedings Article | 25 August 2000 Paper

Precise mask alignment design to crystal orientation of (100) silicon wafer using wet anisotropic etching

Ping-Hei Chen, Chang-Ming Hsieh, Hsin-Yah Peng, Minking Chyu

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396466

KEYWORDS: Optical alignment, Silicon, Semiconducting wafers, Photomasks, Anisotropic etching, Etching, Optical inspection

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Proceedings Article | 19 August 1999 Paper

Numerical and experimental study of capillary forces in trapezoid microgrooves

Tsung-Sheng Sheu, Pei-Pei Ding, Ping-Hei Chen

Proceedings Volume 3877, (1999) https://doi.org/10.1117/12.359349

KEYWORDS: Microfluidics, Liquids, Heat flux, Thin films, Capillaries, Copper, Measurement devices, Bioalcohols, Temperature metrology, Solids

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