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Qais Sadeeh
at Physikalisch-Technische Bundesanstalt
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Publications (1)
Proceedings Article | 20 June 2021 Presentation
Optical constants for EUV scatterometry
Richard Ciesielski, Qais Saadeeh, Philipp Naujok, Karl Opsomer, Jean-Philippe Soulié, Meiyi Wu, Vicky Philipsen, Robbert W.. van de Kruijs, Michael Kolbe, Frank Scholze, Victor Soltwisch
Proceedings Volume 11783, 117830M (2021) https://doi.org/10.1117/12.2592543
KEYWORDS: Reflectivity, Photomasks, Data modeling, X-rays, Thin films, Statistical modeling, Semiconductors, Scattering, Phase shifting, Nanostructures
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