White-light scanning interferometry (WSI) is an important tool in the surface topography measurement. The range of white light interference fringes is very narrow, which makes the traditional method of finding fringes extremely timeconsuming and inefficient, affecting the efficiency and automation of the measurement. Aiming at these problems, a composite auto-focus method for on-machine WSI is proposed in this paper. Utilizing the feature of constant relative axial position of cutting tool and measuring system, the position near the interference fringes is quickly located. Then the mountain climbing strategy is adopted to roughly locate the focusing position with the wide spectral light source. Finally, the narrow spectral light source is used to accurately locate the position of zero optical-path difference by finding the coherent envelope peak. The experiments shows that the proposed auto-focus method is effective to find clear fringes in the on-machine interferometry measurement and can achieve a nanoscale accuracy within microns range.
Right-angle conical mirror is widely used for wavefront conversion, which can construct a null interferometric optical path to achieve interferometric measurement of the cylindrical full-surface topography. However, the effect of the misalignment error on measurements is very significant, due to the difficulty in adjusting the position and attitude of the right-angle conical mirror and the measured cylindrical surface to the ideal state. The pure tilt misalignment errors will lead to parallel interference fringes. Based on this important finding, we propose a fast separation method of translation and tilt misalignment errors. First, adjust the relative translation of the right-angle conical mirror and the cylinder to be measured until all interference fringes are parallel. Then, perform measurement and remove the regular primary tilt from the result to separate the misalignment error effectively, so that the cylindrical full-surface topography is obtained. Under various misalignment errors, the extreme difference of all the PV values of the cylindrical surfaces measured by our method is less than 0.07λ. Experiments indicate that the proposed method can obtain essentially consistent measurements under different misalignment errors. Furthermore, the method is simple to operate and requires no data processing, laying the foundation for the practical application of cylindrical full-surface interferometry measurement.
Defect has become the bottleneck that limits the further increase of energy output in high-power laser devices, accurate defect detection is important for defect evaluation and optical component quality control. The bright-field methods have the problem that the illumination background light affects the measurement sensitivity. The dark-field measurement methods can remove the illumination background light, and the defect detection sensitivity is higher. However, the surface shape information is also removed out, thus the defect depth information is missing. In addition, the axial resolution of defect detection under regular illumination is rather low due to the influence of out-of-focus light. In this paper, a defect detection method based on bright-dark-field structured illumination microscopy (BDSIM) is proposed. This method takes the advantage of the high axial resolution of structured illumination, reconstructs the surface shape by bright-field configuration, and detects the surface and subsurface defect by dark-field configuration. Experiments prove that our method can effectively measure the surface and subsurface defects with accurate depth information.
We proposed a subaperture stitching method for concave–convex microstructured surfaces. The method is mainly based on wavelet transform (WT) and three-dimensional (3D) data matching. WT is applied to separate the high-frequency information from the low-frequency information, then the speeded-up robust feature-random sample consensus algorithm is used to match 3D surface data and calculate lateral displacement between adjacent subapertures. Finally, the pose is adjusted to obtain the stitching result. Simulations and experiments show that the proposed method can effectively stitch concave–convex microstructured surfaces.
Surface defect is a concerned aspect of surface integrity in ultra-precision machining. The dark field microscopy method is efficient in detecting surface processing defects, and has certain development potential. However, it still has deficiencies on reliability, certainty and cross-scale adaptability. In this paper, several kinds of dark field illumination modes are compared, and high contrast and adaptable illumination modes are defined through experiments. Then a defect detection device is designed, which can detect the surface defects of opaque or transparent components by using the dome light source illumination. To enlarge the field of view (FOV), an X-Y scanning stage is used to obtain sub-area image of the surface, and a stitching method based on feature registration with SURF (Speeded Up Robust Features) is also proposed in the manuscript. Researches show that the defect detection device designed in this paper can obtain detailed, high-contrast, and wide range dark field defect images; SURF registration is insensitive to image translation, rotation, scaling and image noise, and has high calculation speed, which can relax the requirement of image stitching on positioning device and environment. This study provides an effective and low-cost solution for defects detection over large-scale surface in ultra-precision machining.
Interferometer is a powerful tool for optical surface measurement, including figure and roughness, due to its nanometer accuracy and non-contact manner. Traditional phase-shifting interferometry (PSI) is much sensitive to environmental vibration that impairs its application in measurement in workshop or on machine. Based on the iterative algorithm that is tolerant to phase-shifting error caused by vibration, two interferometers are developed to measure the optical surface figure and roughness respectively. A laser interferometer, of which the aperture size is 150mm, has been built to measure the surface figure. Practical test demonstrates that the laser interferometer achieves accuracy better than 5nm under vibration of 0.4 micron-amplitude over a large frequency range, 0-35Hz. And an interferometric microscope has been proposed to measure the surface roughness and verified to be effective. The measuring area of the microscope depends on the employed interference objective, and a typical value is about 1 squared millimeter. The error of measured roughness (Sq) under vibration, 0.4 micron-amplitude and over 0-20Hz frequency range, is less than 0.5nm. The developed method and instruments could be applied to optical surface measurement in vibration. The study relaxes the requirement of interferometers on environment and predicates an in-workshop or on-machine solution for optical surface measurement.
Surface and subsurface defects significantly impact on the performance of optical components, especially on high-power laser optics, of which the damage threshold will be lowered by defects. Therefore, it is required to detect defects in optical manufacturing. In this paper, a novel dark-field microscopic imaging method, Circular-Aperture Microscopy (CAM), is proposed for defect detecting of optical surfaces. In CAM, an illuminating ray transmits through the optical surface and is blocked by a small obscuration attached on the objective. The scattered light by the defect propagates through the circular aperture formed by the obscuration, and forms a high-contrast image on the camera. Because the illuminating ray is blocked, CAM is a dark-field imaging method. Since the illumination light is incident perpendicularly to the surface, there is no shadow effect in CAM. The imaging results of scratches and pitted standard comparison plates, resolution transmission test plates, SiO2 suspensions and other samples show that CAM has the advantages of simple principle, high contrast, high resolution, and high precision, It can provide an effective method for defect detection and control in optical surface manufacturing.
In the interferometric subaperture stitching, the subaperture-overlapped regions are often inaccurately positioned due to positioning error. To achieve better stitching effect, we propose a robust subaperture stitching method based on three-dimensional surface data matching. Speeded up robust features algorithm is used to calculate the relative displacements of adjacent subapertures, and subsequent pose adjusting is performed according to the displacements. The method needs neither auxiliary measures nor a known initial displacement value, which can eliminate the dependence on the precision of the mechanical device of the subaperture stitching. Experiments show that the proposed method can obtain smooth, mosaic-free surface results without dislocation.
Zinc sulfide is a kind of typical infrared optical material, commonly produced using single point diamond turning (SPDT). SPDT can efficiently produce zinc sulfide aspheric surfaces with micro-roughness and acceptable figure error. However the tool marks left by the diamond turning process cause high micro-roughness that degrades the optical performance when used in the visible region of the spectrum. Magnetorheological finishing (MRF) is a deterministic, sub-aperture polishing technology that is very helpful in improving both surface micro-roughness and surface figure.This paper mainly investigates the MRF technology of large aperture off-axis aspheric optical surfaces for zinc sulfide. The topological structure and coordinate transformation of a MRF machine tool PKC1200Q2 are analyzed and its kinematics is calculated, then the post-processing algorithm model of MRF for an optical lens is established. By taking the post-processing of off-axis aspheric surfacefor example, a post-processing algorithm that can be used for a raster tool path is deduced and the errors produced by the approximate treatment are analyzed. A polishing algorithm of trajectory planning and dwell time based on matrix equation and optimization theory is presented in this paper. Adopting this algorithm an experiment is performed to machining a large-aperture off-axis aspheric surface on the MRF machine developed by ourselves. After several times’ polishing, the figure accuracy PV is proved from 3.3λ to 2.0λ and RMS from 0.451λ to 0.327λ. This algorithm is used to polish the other shapes including spheres, aspheres and prisms.
To apply phase-shifting interferometry (PSI) to in-situ measurement, we have proposed an algorithm to detect and suppress phase-shifting error and contrast fluctuation. The phase shift and contrast are analyzed in spatial-frequency domain. The strength of baseband and sideband implies the pattern contrast. The position and phase angle of the sideband indicates the tilt gradients and translational value of phase shift. Thus, the phase shift error and contrast fluctuation could be extracted. A contrast-compensated equation is established to calculate the wavefront phase. The proposed algorithm was applied to the interferograms subjecting to vibration and wavefront phase was calculated. The experimental results show that, under vibration of one micron amplitude and 60Hz frequency, the error of wavefront PV value is less than 0.01wave and the 2σ repeatability is less than 0.01wave. For no hardware is required, the proposed algorithm provides a cost-effective method for wavefront in-situ measurement with PSI.
With the minimization of optical devices, the size of lens becomes much smaller. As a crucial parameter of spherical
lens, the measurement of curvature radius is valuable in small lens manufacturing. In this paper, confocal microscope
method is proposed to measure curvature radius of spherical lens, especially small spherical lens. The setup of this
method consists of a confocal microscope and a grating bar. The detector of confocal microscope gives maximum output
when the spherical surface is placed at “cat’s eye” position or confocal position. The distance between cat’s eye and
confocal position is the curvature radius of spherical surface. This method is suitable for both concave and convex
surface. The response of detector to axial and traversal displacement is analyzed and simulated. And the measurement
error is estimated with the simulated results. The setup employed a 10x microscope objective of 0.2 NA and pinhole of
0.04mm diameter, and experiment was conducted to measure the radius of a standard optical ball of 3mm diameter. The
error of result is less than 0.01mm. It’s concluded that the error could be reduced less than 0.001mm with higher
numerical aperture and more precise movement stages.
Dynamic concentricity measurement of small holes distributed in large room is valuable in assembling some big and
complex optical facility. It's not feasible for the conventional measurement with portable CMM or laser tracker. A
solution of dynamic concentricity measurement is put forward in this article, in which low power laser was selected as
reference and camera &lens were used to acquire images of holes and laser spots. The relative orientation of hole and
spot could be detected after image processing. To overcome the shortcoming that the edge of laser spot could not be
detected for laser's Gaussian character with traditional method, a virtual annular quadrant (VAQ) method was proposed
to determine the relative orientation between small holes and laser spot. With the simulation of VAQ method, the
property was analyzed and the parameters of VAQ were optimized with the simulation results. Experiments were carried
out to test VAQ method, and comparison of simulated and experimental results has confirmed the accuracy of VAQ
method. A dynamical concentricity measuring system based on VAQ method is developed, which can perform one
measurement in 5 seconds and has accuracy of about 0.015mm.
KEYWORDS: Atrial fibrillation, Microscopes, Machine vision, Fermium, Frequency modulation, 3D vision, Metrology, Modulation transfer functions, 3D metrology, Image filtering
Machine vision now is widely used as non-contact metrology which is a trend of measurement. In this article, a 3D
machine vision probe for engineering is designed. The XY axial measurement is done by 2D vision metrology, while the
Z axial height is measured by microscope through auto-focus (AF). As the critical part of probe, a long work distance
(WD) microscope is well designed. To attain the long WD, a positive and a negative lens group configure the microscope.
The microscope, with resolution of 1μm and WD of 35mm, is quite closed to diffraction limited as evidenced from MTF
(Modulation Transfer Function) chart.The AF, a key technology in probe designing, is particularly introduced. Images
acquired by microscope are calculated to get the AF curve data. To make the AF curve smooth, the images are denoised
and the curve is processed with a low pass filter (LPF). And a new method of curve fitting is involved to get the accuracy
focused position.The measurement with probe shows that the uncertainty is 0.03μm at XY axial plane, while the
uncertainty is less than 3μm at Z axial height. It indicates that our probe achieves requirements.
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