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Shu Qiang
at Institute of Optics and Electronics CAS
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Publications (1)
Proceedings Article | 15 October 2012 Paper
Inverse Open loop Control of a Nano-positioner Based on Piezo-electric Actuators
Shu Qiang, Xuejun Rao, Ningping Shi
Proceedings Volume 8418, 84181I (2012) https://doi.org/10.1117/12.970645
KEYWORDS: Actuators, Data modeling, Mathematical modeling, Adaptive optics, Feedback control, Control systems, Error analysis, Dynamical systems, Optics manufacturing, Data acquisition
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