Dr. Rachel A. Nye Profile

Dr. Rachel A. Nye

at North Carolina State Univ

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Author

Publications (2)

SPIE Journal Paper | 4 November 2022

Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO2 area-selective deposition

Rachel Nye, Kaat Van Dongen, Hironori Oka, Danilo De Simone, Gregory Parsons, Annelies Delabie

JM3, Vol. 21, Issue 04, 041407, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041407

KEYWORDS: Polymers, Extreme ultraviolet lithography, Atomic layer deposition, Extreme ultraviolet, Silicon, Polymer thin films, Annealing, Titanium dioxide, Photoresist processing, Etching

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Proceedings Article | 25 May 2022 Presentation + Paper

Improving polymethacrylate EUV resists with TiO2 area-selective deposition

Rachel Nye, Kaat Van Dongen, Hironori Oka, Hajime Furutani, Gregory Parsons, Danilo De Simone, Annelies Delabie

Proceedings Volume 12055, 120550C (2022) https://doi.org/10.1117/12.2613815

KEYWORDS: Polymers, Atomic layer deposition, Extreme ultraviolet lithography, Titanium dioxide, Surface roughness, Surface properties, Chemically amplified resists

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