Excimer lamps take place among the numerous industrial applications which rely on cold plasmas generated by means of Dielectric Barrier Discharges. For the performance and reliability of these applications, the control of the electrical energy injected into the plasma is of prominent importance; it also contributes to the homogeneity of the electrical discharge and to the amount of created excited species, thus the UV emission. In this scope, we have developed generations of pulsed current power supplies aimed at controlling the energy of the injected pulses. For UV generation processes by means of excimer lamps, the design approach of two of the most performing topologies is presented. The performances are highlighted, as well as the pitfalls and solutions for their use. The critical impact of the high voltage transformer, through its parasitic parameters, is pointed out, as well as solutions trying to take advantage of them.
A parametric study of a system dedicated to non-coherent UV emission, by means of DBD excilamps, supplied by a controlled square shape current source is proposed. The presentation highlights on the one hand the performances experimentally obtained by combining together a set of 20 different bulbs with different diameters, gap and wall thicknesses (all the bulbs have the same length and are filled with the same Xe-Cl gas mixture), with different electrical power supplying conditions: magnitude, frequency (in the 30 kHz – 200 kHz range) and duty cycle of the square shape current pulses injected into the bulb. The performances concern the average UV power, the efficiency of the bulb conversion (electrical power to UV) and the adjustability of the power. On the second hand, we present design considerations of the power supply which has been especially developed for the purpose of these experiments.
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