KEYWORDS: Carbon, Nitrogen, Quartz, Chemical vapor deposition, Temperature metrology, Crystals, Chemical species, Raman spectroscopy, FT-IR spectroscopy, Scanning electron microscopy
Nanostructured carbon nitride films were prepared by pyrolysis assisted chemical vapour deposition(CVD). A two zone
furnace with a temperature profile having a uniform temperature over a length of 20 cm length has been designed and
developed. The precursor Azabenzimidazole was taken in a quartz tube and evaporated at 400 0C. The dense vapours
enter the pyrolysis zone kept at a desired temperature and deposit on the quartz substrates. The FTIR spectrum of the
prepared samples shows peaks at 1272 cm-1 (C.N stretching) and 1600 cm-1 (C=N) confirms the bonding of nitrogen with carbon. Raman D and G peaks, are observed at 1360 cm-1 and 1576 cm-1 respectively. XPS core level spectra of C 1s and N 1s show the formation of π bonding between carbon and nitrogen atoms. The size of the nano crystals estimated
from the SEM images and XRD is ~100 nm. In some regions of the sample a maximum of 57 atom % of nitrogen has been observed.
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