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Raymond Castonguay
Founder/President at SPECTRA INSIGHT, LLC
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Publications (4)
Proceedings Article | 11 August 2008 Paper
Measurements of aspheric surfaces
Proceedings Volume 7063, 706317 (2008) https://doi.org/10.1117/12.804731
KEYWORDS: Aspheric lenses, Interferometers, Optical spheres, Spherical lenses, Interferometry, Wavefronts, Photovoltaics, Ray tracing, Fizeau interferometers, Calibration
Proceedings Article | 7 October 1994 Paper
OMNISCATR: a high-speed high-resolution three-dimensional scatterometer measures complex scatter interference and diffraction patterns
Proceedings Volume 2260, (1994) https://doi.org/10.1117/12.189218
KEYWORDS: Particles, Diffraction, Scatter measurement, Semiconducting wafers, Lenses, 3D metrology, Light scattering, Scanning electron microscopy, Contamination, Microscopes
Proceedings Article | 7 October 1994 Paper
Accuracy and repeatability results of OMNISCATR: a high-speed high-resolution three-dimensional scatterometer
Proceedings Volume 2260, (1994) https://doi.org/10.1117/12.189205
KEYWORDS: 3D metrology, Data acquisition, Cameras, Bidirectional reflectance transmission function, Scatter measurement, Mirrors, Reflectivity, Light scattering, 3D acquisition, Reflection
Proceedings Article | 1 December 1993 Paper
New generation high-speed high-resolution hemispherical scatterometer
Proceedings Volume 1995, (1993) https://doi.org/10.1117/12.162660
KEYWORDS: Mirrors, Diffraction, Scattering, 3D metrology, Light scattering, Scatter measurement, Molybdenum, 3D image processing, Data acquisition, Diamond
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