Mr. Rico Bohme Profile

Rico Bohme

at Leibniz-Institut für Oberflächenmodifizierung eV

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Author

Publications (3)

Proceedings Article | 14 June 2006 Paper

Direct laser etching of transparent materials: high quality surface patterning and figuring for micro-optical applications

R. Böhme, K. Zimmer, B. Rauschenbach

Proceedings Volume 6254, 62540P (2006) https://doi.org/10.1117/12.675963

KEYWORDS: Etching, Laser processing, Silica, Laser ablation, Surface roughness, Diffraction gratings, Pulsed laser operation, Atomic force microscopy, Scanning electron microscopy, Laser applications

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Proceedings Article | 18 April 2006 Paper

Laser etching of periodic 1D- and 2D-submicron relief gratings on prestructured fused silica surface

Rico Böhme, Klaus Zimmer

Proceedings Volume 6182, 61820T (2006) https://doi.org/10.1117/12.662401

KEYWORDS: Etching, Silica, Solids, Laser processing, Liquids, Pulsed laser operation, Diffusion, Laser ablation, Surface roughness, Interfaces

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Proceedings Article | 24 April 2003 Paper

Microstructuring of Pyrex glass and polymers by excimer laser

Bernd Keiper, Robby Ebert, Rico Bohme, Horst Exner

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499002

KEYWORDS: Glasses, Excimer lasers, Pulsed laser operation, Laser drilling, Semiconducting wafers, Polymers, Microsystems, Polymethylmethacrylate, Bridges, Laser processing

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