Mr. Rishabh Kushwaha Profile

Rishabh Kushwaha

at KLA Corp

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Publications (1)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

In device overlay control with multiple overlay metrology in 3D-NAND process

Li-Ting Chang, Yu-Lin Liu, Chi-hao Huang, Rishabh Kushwaha, Yen Chun Chuan Sun, Cheng Hung Wu, Shao Chang Cheng, Hsiao Fei Su, Yen Hung Liu, Mars Yang, Elvis Yang, T. H. Yang, K. C. Chen

Proceedings Volume 12053, 120531P (2022) https://doi.org/10.1117/12.2613193

KEYWORDS: Overlay metrology, Single crystal X-ray diffraction, Metrology, Semiconducting wafers, 3D metrology, Control systems, Process modeling, Polishing, Etching, Image processing

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