Prof. Ronald Albert Lawes Profile

Prof. Ronald Albert Lawes

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 2 April 2004 Paper

LIGA for Boomerang

Ronald Lawes, Graham Arthur

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.532759

KEYWORDS: Polymethylmethacrylate, Synchrotrons, X-rays, Semiconducting wafers, Helium, Photons, Beryllium, Glasses, Photomasks, Absorption

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Proceedings Article | 19 November 2001 Paper

LIGA: a fabrication technology for industry?

Ronald Lawes, Graham Arthur, Andreas Schneider

Proceedings Volume 4593, (2001) https://doi.org/10.1117/12.448845

KEYWORDS: Synchrotrons, Photomasks, Manufacturing, Polymethylmethacrylate, X-rays, Beryllium, Nickel, Semiconducting wafers, Photoresist processing, Gold

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Proceedings Article | 7 June 1996 Paper

193-nm imaging using a small-field high-resolution imaging resist exposure tool

Nadeem Rizvi, Malcolm Gower, Dominic Ashworth, Neil Sykes, Phil Rumsby, Bruce Smith, Francis Goodall, Ronald Lawes

Proceedings Volume 2726, (1996) https://doi.org/10.1117/12.240981

KEYWORDS: Semiconducting wafers, Excimer lasers, Imaging systems, Polymethylmethacrylate, Photoresist materials, Laser development, Optical lithography, Silica, Deep ultraviolet, Combined lens-mirror systems

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Proceedings Article | 1 April 1992 Paper

Excimer lasers for submicron feature generation

Ronald Lawes

Proceedings Volume 1573, (1992) https://doi.org/10.1117/12.57747

KEYWORDS: Excimer lasers, Laser ablation, Lenses, Polymers, Lens design, Manufacturing, Laser processing, Deep ultraviolet, Laser development, Pulsed laser operation

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