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Rudy Desgarceaux
at Institut d'Électronique et des Systèmes
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Publications (1)
SPIE Journal Paper | 8 September 2016 Open Access
Fabrication of quartz microcylinders by laser interference lithography for angular optical tweezers
Zhanna Santybayeva, Afaf Meghit, Rudy Desgarceaux, Roland Teissier, Frederic Pichot, Charles de Marin, Benoit Charlot, Francesco Pedaci
JM3, Vol. 15, Issue 03, 034507, (September 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.034507
KEYWORDS: Quartz, Optical tweezers, Particles, Lithography, Photoresist materials, Polarization, Etching, Electron beam lithography, Submicron lithography, Chromium
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