Dr. Rusty Conner Profile

Dr. Rusty Conner

at Intel Corp

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Publications (1)

Proceedings Article | 30 April 2023 Presentation

A CD uniformity study comparing MRC-constrained all-angle to Manhattan OPC corrections on EUV

Ryan Pearman, Ragu Venkatesan, Arvind Sundaramurthy, Patrick Straney, Zach Rice, Rusty Conner, Harsha Grunes

Proceedings Volume 12495, 124950F (2023) https://doi.org/10.1117/12.2662761

KEYWORDS: Photomasks, Optical proximity correction, Extreme ultraviolet, Optics manufacturing, High volume manufacturing, Extreme ultraviolet lithography

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