To simultaneously reduce miss and over-detection in visual inspection for defect detection, asymmetric detection techniques practiced by skilled workers were helpful. A CNN-based asymmetric label smoothing method was developed to implement the techniques in a visual inspection.
Preventive medicine is growing in importance, with vascular stiffness being a key factor. Blood flow velocity plays a crucial role in assessing vascular health. If velocity exceeds 12 m/s, it indicates an unhealthy vascular condition. Traditional methods of measuring blood flow velocity involve contact-based systems, but there is a rising demand for non-contact alternatives. Two common non-contact methods are Doppler laser interferometry and shearing-speckle interferometry. The latter is simpler, cost-effective, and mitigates the impact of body movement. This study aimed to develop a blood flow velocity measurement device using shearing-speckle interferometry. Experimental results demonstrated successful estimation of blood flow velocity using this method, showing potential for its application in preventive medicine to monitor and diagnose vascular stiffness.
An ultra-intense short pulse laser induces a shock wave in material. The pressure of shock compression is stronger than a few tens GPa. To characterize shock waves, time-resolved velocity measurement in nano- or pico-second time scale is needed. Frequency domain interferometer and chirped pulse laser provide single-shot time-resolved measurement. We have developed a laser-driven shock compression system and frequency domain interferometer with CPA laser. In this paper, we show the principle of velocity measurement using a frequency domain interferometer and a chirped pulse laser. Next, we numerically calculated spectral interferograms and show the time-resolved velocity measurement can be done from the phase analysis of spectral interferograms. Moreover we conduct the laser driven shock generation and shock velocity measurement. From the spectral fringes, we analyze the velocities of the sample and shockwaves.
Phase measuring deflectometry is an emerging technique to measure specular complex surface, such as aspherical
surface and free-form surface. It is very attractive for its wide dynamic range of vertical scale and application range.
Because it is a gradient based surface profilometry, we have to integrate the measured data to get surface shape. It can be
cause of low accuracy. On the other hand, interferometry is accurate and well-known method for precision shape
measurement. In interferometry, the original measured data is phase of interference signal, which directly shows the
surface shape of the target. However interferometry is too precise to measure aspherical surface, free-form surface and
usual surface in common industry. To assure the accuracy in ultra-precision measurement, reliability is the most
important thing. Reliability can be kept by cross-checking. Then I will propose measuring method using both
interferometer and deflectometry for reliable shape measurement. In this concept, global shape is measured using
deflectometry and local shape around flat area is measured using interferometry. The result of deflectometry is global
and precise. But it include ambiguity due to slope integration. In interferometry, only a small area can be measured,
which is almost parallel to the reference surface. But it is accurate and reliable. To combine both results, it should be
global, precise and reliable measurement. I will present the concept of combination of interferometry and deflectometry
and some preliminary experimental results.
Interferometric surface measurement of parallel plates presents considerable technical difficulties owing to multiple beam interference. To apply the phase-shifting technique, it is necessary to use an optical-path-difference-dependent technique such as wavelength tuning that can separate interference signals in the frequency domain. In this research, the surface shape and optical thickness variation of a lithium niobate wafer for a solid Fabry-Perot etalon during the polishing process were measured simultaneously using a wavelength-tuning Fizeau interferometer with a novel phase shifting algorithm. The novel algorithm suppresses the multiple beam interference noise and has sidelobes with amplitudes of only 1% of that of the main peak. The wafer, which was in contact with a supporting glass parallel plate, generated six different interference fringes that overlapped on the detector. Wavelength-tuning interferometry was employed to separate the specific interference signals associated with the target different optical paths in the frequency domain. Experimental results indicated that the optical thickness variation of a circular crystal wafer 74 mm in diameter and 5-mm thick was measured with an uncertainty of 10 nm PV.
In this report, we propose a zero-method interferometer by means of dynamic generation of reference wave front using
liquid crystal type spatial light modulator (LCoS-SLM). This interferometer was developed to aim to measure the shape
of complex plane, such as aspherical plane. It is difficult for interferometer to measure such a surface which include large
inclination, because of the problem of saturation of interference fringe. To overcome this problem, and to enlarge the
dynamic range of interferometer, we attempted to combine interferometer and zero-method. Zero-method is
characterized by its wide dynamic range. To apply zero-method to interferometer, SLM is adopted to configure variable
reference surface. The basic configuration of the developed interferometer is Twyman-Green interferometer. A SLM is
placed instead of reference mirror. In this interferometer, the shape of a target is measured using interference between
object wave front and reference wave front that is generated using SLM. At first, the SLM generates flat wave front. And
the detected phase map is fed back to the SLM. Then the difference between object wave front and detected phase map
in the first turn. The operation is recursively repeated until the phase range of detected phase map becomes under the
threshold. Then the generated wave front should become equal to the target shape. In this report, the basic idea of zeromethod
interferometer using LCoS-SLM is verified through several numbers of simulative experiments.
Error estimation method of phase detection in phase shift method is proposed. Phase detection algorithms extract phase
of fringes from several interferograms that are acquired during phase shifting. The Fourier domain expression of phase
detection algorithms show frequency response for sine and cosine components, and it shows behavior of detected phase
in the case if phase shifting error exists. However, these two response functions do not directly show frequency response
of phase detection itself. On the contrary, newly proposed frequency response function directly shows frequency
response of phase detection. And it clearly shows the behavior of phase detection algorithm when phase tuning error
exists. The proposed method is inspired by the Bode plot. It is easy to assume that magnitude plot also can be defined in
addition to the phase plot. The magnitude plot can be used for prediction of the sensitivity to the signal and noise. And
the phase plot can be used for error estimation of phase detection in the presence of phase tuning error. After some
investigations, it was found that there is good agreement between the developed frequency response function and
calculated error value. Therefore, it can be used as an error estimation method for phase detection algorithm. A window
function modifies specifications of phase detection algorithm. Comparisons of several numbers of window functions on
phase detection method were demonstrated using proposed method. Additionally, we discuss window function, which
makes phase detection algorithm insensitive to phase detuning.
In this report, error estimation method of phase detection in phase shift method is proposed. Phase detection algorithm
extracts phase of modulated signal from several numbers of interferogram that acquired during phase shifting. The
fourier domain expression of phase detection algorithms show frequency response for sine and cosine components. And
it shows behavior for phase detection in the case that phase shifting error exists. However, these two response functions,
those are response function for sine component and that for cosine component, do not directly show frequency response
of phase detection itself. On the contrary, newly developed frequency response function, which is derived from these two
frequency response function, directly shows frequency response of phase detection. And it clearly shows the behavior of
phase detection algorithm when phase tuning error exists. The newly developed frequency response function is similar to
the Bode plot. The magnitude plot shows sensitivity for frequency components. And the phase plot can be used for error
estimation of phase detection. There is good agreement between the developed frequency response function and
calculated error value. These results of comparison between error estimation using developed frequency response
function and calculated error value are shown in this report.
In this report, lens testing method for small lenses is discussed. Cylindrical or aspherical lenses are included to the scope
of this report in addition to spherical lenses. A shearing interferometer is applied for the measurement. That consists of a
plane parallel plate for inducing lateral shear for the test beam. This method is robust to disturbances because it is a
common path interferometry. Moreover it is not necessary to prepare reference lens. For these reasons it can be said that
this method is practical and is good for using at actual factories.
Wavelength tuning interferometry can distinguish interference signals from different surfaces in frequency space. The optical thickness variation of each layer of a multiple-surface object was measured by a new tunable phase measuring algorithm which can efficiently compensate for the frequency detuning of the interference signals. A two-layer object consisting of Lithium Niobate (LNB) wafer on the supporting glass parallel was measured by the new tunable algorithm in a Fizeau interferometer. Experimental results show that the optical thickness variation of the top wafer was measured with an error of λPV over a 70 mm diameter aperture.
Wavelength scanned interferometry can distinguish in frequency space interference signals from different surfaces , and therefore allows the measurement of optical thickness variation between several quasi-parallel surfaces of a composite transparent object. Discrete Fourier analysis of the signal spectrum with a suitable sampling window can then detect the phase of the individual signals. The actual frequencies of the various signals can deviate from their nominal detection frequencies because of refractive index dispersion of the material and/or nonlinearities in the wavelength scanning. This creates problems for conventional sampling window functions, such as the von Hann window, because they are sensitive to detuning of the signal frequency. Therefore we have derived an error-compensating algorithm (with 2N-1 samples and individual phase steps of 2p/N) with a modified triangular window that allows some frequency detuning and can determine the phase of any specific harmonic order within the frequency range of the detected signal. A composite object consisting of four reflecting surfaces was measured using the new algorithm in a Fizeau interferometer. Experimental results show that the new algorithm measured the front surface and the optical thickness variations in a glass-air-glass cavity with an error of 10 nm rms over a 90 mm diameter aperture.
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