Dr. Sangoh Park Profile

Dr. Sangoh Park

at SAMSUNG Electronics Co., Ltd.

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Hard failure prediction of ADI pattern using optical parameters and machine learning

Yeongchan Cho, Seongjeon Choi, Wonchan Lee, Hungbae Ahn, Sangoh Park, Dongho Kim, Seunghune Yang

Proceedings Volume 12953, 129530D (2024) https://doi.org/10.1117/12.3010633

KEYWORDS: Principal component analysis, Photoresist materials, Machine learning, Product development, Optical lithography, Yield improvement, Failure analysis, Design

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