Dr. Sebastian W. Schmidt
at nanotools GmbH
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Publications (5)

Proceedings Article | 19 March 2015 Paper
Johann Foucher, Sebastian Schmidt, Aurelien Labrosse, Alexandre Dervillé, Sandra Bos, Sebastian Schade, Bernd Irmer
Proceedings Volume 9424, 94240S (2015) https://doi.org/10.1117/12.2085977
KEYWORDS: Atomic force microscopy, Scanning electron microscopy, Image analysis, Silicon, Metrology, Critical dimension metrology, Neck, Algorithm development, Process control, Image processing

Proceedings Article | 17 May 2013 Paper
Sebastian Schmidt, Johann Foucher, Christian Penzkofer, Bernd Irmer
Proceedings Volume 8763, 876316 (2013) https://doi.org/10.1117/12.2017430
KEYWORDS: Atomic force microscopy, Nanolithography, Microelectromechanical systems, Nanoelectromechanical systems, Californium, Silicon, Inspection, Scanning electron microscopy, Electron beams, Nanostructures

Proceedings Article | 10 April 2013 Paper
Johann Foucher, Pavel Filippov, Christian Penzkofer, Bernd Irmer, Sebastian Schmidt
Proceedings Volume 8681, 86811I (2013) https://doi.org/10.1117/12.2011451
KEYWORDS: Silicon, Silica, Atomic force microscopy, Inspection, Lithography, Manufacturing, Semiconductors, Electron beams, Critical dimension metrology, Directed self assembly

Proceedings Article | 6 April 2012 Paper
Johann Foucher, Sebastian Schmidt, Christian Penzkofer, Bernd Irmer
Proceedings Volume 8324, 832432 (2012) https://doi.org/10.1117/12.916438
KEYWORDS: Atomic force microscopy, Silicon, Scanning electron microscopy, Carbon, Semiconductors, Critical dimension metrology, Silicon carbide, Electron beams, Manufacturing, Process control

Proceedings Article | 5 April 2012 Paper
Sebastian Schmidt, Christian Penzkofer, Bernd Irmer
Proceedings Volume 8324, 83242E (2012) https://doi.org/10.1117/12.917629
KEYWORDS: Neon, Californium, Electron beams, Manufacturing, Scanning electron microscopy, Metals, Critical dimension metrology, Carbon, Oxides, Carbon nanotubes

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