Mr. Seiji Morita Profile

Seiji Morita

Chief Research Officer at Wisdom Pool Research Institute G.K

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 9 April 2024 Presentation + Paper

Biomass developer made from plants for lithography processes

Seiji Morita

Proceedings Volume 12957, 1295719 (2024) https://doi.org/10.1117/12.3010878

KEYWORDS: Biomass, Lithography, Scanning electron microscopy, Carbon, Image processing, Biofuels, Semiconductors, Extreme ultraviolet, Ultraviolet radiation, Photoresist processing

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Proceedings Article | 28 March 2017 Presentation + Paper

Wide-range directed self-assembly lithography enabling wider range of applicable pattern size for both hexagonal multi-hole and line/space

Seiji Morita, Ryuichi Saito, Ryosuke Yamamoto, Norikatsu Sasao, Tomoaki Sawabe, Koji Asakawa, Shinobu Sugimura

Proceedings Volume 10144, 101440R (2017) https://doi.org/10.1117/12.2257987

KEYWORDS: Lithography, Dry etching, Immersion lithography, Annealing, Resistance, Double patterning technology, Molecular self-assembly, Optical lithography, Scanning electron microscopy, Organic materials, Directed self assembly, Semiconducting wafers, Reactive ion etching, Metals

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Proceedings Article | 4 April 2016 Paper

Sub-15nm patterning technology using directed self-assembly on nano-imprinting guide

Seiji Morita, Masahiro Kanno, Ryousuke Yamamoto, Norikatsu Sasao, Shinobu Sugimura

Proceedings Volume 9777, 97770K (2016) https://doi.org/10.1117/12.2219141

KEYWORDS: Directed self assembly, Nanoimprint lithography, Optical lithography, Lithography, Quartz, Line edge roughness, Image processing, Photoresist processing, Line width roughness, Coating

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SPIE Journal Paper | 7 August 2014 Open Access

Optimization of directed self-assembly hole shrink process with simplified model

Kenji Yoshimoto, Ken Fukawatase, Masahiro Ohshima, Yoshihiro Naka, Shimon Maeda, Satoshi Tanaka, Seiji Morita, Hisako Aoyama, Shoji Mimotogi

JM3, Vol. 13, Issue 03, 031305, (August 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.3.031305

KEYWORDS: Polymethylmethacrylate, Picosecond phenomena, Transmission electron microscopy, Calibration, Process modeling, Computer simulations, Optimization (mathematics), System on a chip, Image processing, Directed self assembly

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Proceedings Article | 2 April 2014 Paper

New inspection technology for observing nanometer size defects using expansion soft template

Seiji Morita, Ryoji Yoshikawa, Takashi Hirano, Tatsuhiko Higashiki

Proceedings Volume 9050, 90501A (2014) https://doi.org/10.1117/12.2046326

KEYWORDS: Optical inspection, Inspection, Defect detection, Nanotechnology, Lithography, Semiconductors, Ultraviolet radiation, Semiconducting wafers, Organic materials, Optical resolution

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Proceedings Article | 28 March 2014 Paper

New lithography technology for sub-10nm patterning with shrinking organic material

Seiji Morita

Proceedings Volume 9049, 90491I (2014) https://doi.org/10.1117/12.2046307

KEYWORDS: Lithography, Organic materials, Line edge roughness, Ultraviolet radiation, Optical lithography, Electron beam lithography, Polymers, Scanning electron microscopy, Extreme ultraviolet lithography, Directed self assembly

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Proceedings Article | 28 March 2014 Paper

DFM for defect-free DSA hole shrink process

Ken Fukawatase, Kenji Yoshimoto, Masahiro Ohshima, Yoshihiro Naka, Shimon Maeda, Satoshi Tanaka, Seiji Morita, Hisako Aoyama, Shoji Mimotogi

Proceedings Volume 9049, 90491K (2014) https://doi.org/10.1117/12.2046108

KEYWORDS: Polymethylmethacrylate, Picosecond phenomena, Calibration, 3D modeling, Transmission electron microscopy, System on a chip, Data modeling, Computer simulations, Design for manufacturing, Directed self assembly

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Proceedings Article | 26 May 2010 Paper

Fabrication of ridge-and-groove servo pattern consisting of self-assembled dots for high-density bit patterned media

Yoshiyuki Kamata, Akira Kikitsu, Naoko Kihara, Seiji Morita, Kaori Kimura, Haruhiko Izumi

Proceedings Volume 7748, 774809 (2010) https://doi.org/10.1117/12.863873

KEYWORDS: Servomechanisms, Beam propagation method, Magnetism, Head, Photoemission spectroscopy, Etching, Polymers, Scanning electron microscopy, Distortion, Interference (communication)

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Proceedings Article | 11 July 2007 Paper

High-speed HD DVD-R disc with organic dye

Kazuyo Umezawa, Seiji Morita, Koji Takazawa, Naoki Morishita, Naomasa Nakamura

Proceedings Volume 6620, 66202B (2007) https://doi.org/10.1117/12.738921

KEYWORDS: Digital video discs, Dysprosium, Data storage, Stereolithography, Laser stabilization, Reflectivity, Ultraviolet radiation, Signal processing, Clocks, Optical discs

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Proceedings Article | 28 June 1999 Paper

Very small track mastering for higher-density optical disk memory

Seiji Morita, Madoka Nishiyama, Masatoshi Hayashi, Hiroshi Konishi, Toshio Akiyama

Proceedings Volume 3864, 386403 (1999) https://doi.org/10.1117/12.997647

KEYWORDS: Optical discs, Optical tracking, Photoresist materials, Glasses, Surface roughness, Reactive ion etching, Deep ultraviolet, Surface finishing, Scanning electron microscopy, Reflectivity

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Proceedings Article | 30 July 1997 Paper

Deep-groove method on high-density optical disk memory

Seiji Morita, Madoka Nishiyama, Masahiro Furuta

Proceedings Volume 3109, (1997) https://doi.org/10.1117/12.280689

KEYWORDS: Optical discs, Optical tracking, Molybdenum, Reactive ion etching, Optical recording, Scanning electron microscopy, Eye, Modulation, Chlorine, Semiconductor lasers

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Showing 5 of 11 publications

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