Unspecified Sergey S. Zyuzin Profile

Sergey S. Zyuzin

at JSC MERI

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Publications (1)

Proceedings Article | 31 January 2022 Paper

Sergey Zyuzin, Yason Zasseev, Askar Rezvanov, Vitaliy Panin, Vladimir Gvozdev, Yevgeniy Gornev

Proceedings Volume 12157, 121571H (2022) https://doi.org/10.1117/12.2624575

KEYWORDS: Atomic layer deposition, Semiconducting wafers, Oxides, Plasma, Thin films, Thin film deposition, Refractive index, Oxygen

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