Dr. Shengzhou Huang Profile

Dr. Shengzhou Huang

at University of science and technology of China

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Publications (1)

Proceedings Article | 28 October 2016 Paper

Improvement of three-dimensional microstructure contour accuracy using maskless lithography technique based on DMD

Shengzhou Huang, Mujun Li, Lianguan Shen, Jinfeng Qiu, Youquan Zhou

Proceedings Volume 9683, 96831P (2016) https://doi.org/10.1117/12.2242366

KEYWORDS: 3D microstructuring, Maskless lithography, Digital micromirror devices, Aspheric lenses, Photomasks, Micromirrors, Objectives, Lithium, Fabrication, Charge-coupled devices

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