Mr. Shigehiko Miyagi Profile

Shigehiko Miyagi

at Nikon Corp

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Publications (2)

Proceedings Article | 16 September 2022 Paper

High-transmission phase shift mask blank for high-definition flat panel display

Kento Hayashi, Shigehiko Miyagi, Takashi Yagami, Yusuke Taki, Takashi Ozawa

Proceedings Volume 12325, 123250K (2022) https://doi.org/10.1117/12.2642097

KEYWORDS: Phase shifts, Transmittance, Etching, Nitrogen, Resistance, Refractive index, Optical properties, Flat panel displays, Absorbance, Photomasks

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Proceedings Article | 20 September 2020 Presentation

A pattern transfer from semiconductors, and more: Nikon’s large-size photomask blanks for flat panel display

Takashi Yagami, Yohei Takarada, Kento Hayashi, Shigehiko Miyagi, Yusuke Taki, Takashi Ozawa

Proceedings Volume 11518, 115180T (2020) https://doi.org/10.1117/12.2575692

KEYWORDS: Photomasks, Semiconductors, Flat panel displays, Optical lithography, LCDs, Organic light emitting diodes, Lithography, Dry etching, Surface finishing, Polishing

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