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Shih-Wen Lee
at National Tsing Hua Univ
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Publications (1)
Proceedings Article | 22 January 2005 Paper
Design and fabrication of multidirectional microbubble separator
Shih-Wen Lee, Shwin-Chung Wong
Proceedings Volume 5718, (2005) https://doi.org/10.1117/12.587644
KEYWORDS: Liquids, Carbon monoxide, Silicon, Capillaries, Coating, Microelectromechanical systems, Semiconducting wafers, Reactive ion etching, Deep reactive ion etching, Microfluidics
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