Dr. Shikha Somani Profile

Dr. Shikha Somani

at GLOBALFOUNDRIES Inc

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Author

Publications (6)

Proceedings Article | 16 March 2016 Paper

Methodology to extract, data mine and score geometric constructs from physical design layouts for analysis and applications in semiconductor manufacturing

Piyush Pathak, Karthik Krishnamoorthy, Wei-Long Wang, Ya-Chieh Lai, Frank Gennari, Shikha Somani, Bob Pack, Uwe Paul Schroeder, Fadi Batarseh, Jaime Bravo, Jason Sweis, Philippe Hurat, Sriram Madhavan

Proceedings Volume 9781, 978109 (2016) https://doi.org/10.1117/12.2220145

KEYWORDS: Design for manufacturing, Mining, Design for manufacturability, Manufacturing, Semiconductor manufacturing, Image classification, Machine learning, Optical proximity correction, Lithography, Semiconductors, Metals, Databases, Charge-coupled devices, Silicon, Data mining, Computer simulations

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Proceedings Article | 18 March 2015 Paper

Hybrid OPC flow with pattern search and replacement

Piyush Verma, Shikha Somani, Yang Ping, Piyush Pathak, Rani Ghaida, Carl Babcock, Fadi Batarseh, Jingyu Wang, Sriram Madhavan, Sarah McGowan

Proceedings Volume 9426, 942611 (2015) https://doi.org/10.1117/12.2087094

KEYWORDS: Optical proximity correction, Photomasks, SRAF, Photovoltaics, Model-based design, Very large scale integration, Optical lithography, Data modeling, Image classification, Library classification systems

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Proceedings Article | 18 March 2015 Paper

VLSI physical design analyzer: A profiling and data mining tool

Shikha Somani, Piyush Verma, Sriram Madhavan, Fadi Batarseh, Robert Pack, Luigi Capodieci

Proceedings Volume 9427, 942712 (2015) https://doi.org/10.1117/12.2087078

KEYWORDS: Statistical analysis, Very large scale integration, Profiling, Data modeling, Databases, Metals, Data mining, Data processing, Data storage, Visualization

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Proceedings Article | 18 March 2015 Paper

A methodology to optimize design pattern context size for higher sensitivity to hotspot detection using pattern association tree (PAT)

Shikha Somani, Piyush Pathak, Piyush Verma, Sriram Madhavan, Luigi Capodieci

Proceedings Volume 9427, 94270T (2015) https://doi.org/10.1117/12.2086954

KEYWORDS: Acquisition tracking and pointing, Image classification, Very large scale integration, Semiconducting wafers, Defect detection, Metals, Bridges, Computer simulations, Wafer-level optics, Optics manufacturing

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Proceedings Article | 8 October 2014 Paper

Pattern-based pre-OPC operation to improve model-based OPC runtime

Piyush Verma, Fadi Batarseh, Shikha Somani, Jingyu Wang, Sarah McGowan, Sriram Madhavan

Proceedings Volume 9235, 923506 (2014) https://doi.org/10.1117/12.2068998

KEYWORDS: Optical proximity correction, Photomasks, Very large scale integration, Model-based design, Logic, Lithography, Image classification, Library classification systems, Computer simulations, Optics manufacturing

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Proceedings Article | 8 October 2014 Paper

Efficient full-chip QA Tool for design to mask (D2M) feature variability verification

Fadi Batarseh, Piyush Verma, Robert Pack, Shikha Somani

Proceedings Volume 9235, 92351Y (2014) https://doi.org/10.1117/12.2069346

KEYWORDS: Profiling, Photomasks, Optical proximity correction, Image classification, Critical dimension metrology, Product engineering, Neodymium, Structural design, Ions, Library classification systems

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Showing 5 of 6 publications

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