This paper presents a novel desktop device for lapping thin-walled micro groove of a specimen used in optical equipment,
the device is aimed to remove metamorphic layer (about 1μm thick) formed on the groove’s upper surface as well as
ensure its thickness accuracy. It adopts the way of macro/micro motion combination, the macro-motion table uses stepper
motor and ball screws to realize motion in large stroke, high speed and the micron level positioning, the micro-motion
table uses the electrostriction appliance to actuate the flexible four bars mechanism to realize the small stroke, low speed,
and the submicron level positioning. The system uses the strategy of two ways of feedback, the macro/micro motion
table uses the precise linear grating as close-loop position feedback, and the sensing holder uses the eddy current
transducer as the force and deformation feedback of the elastic fixture. The most novel aspect is the first proposed idea of
realizing automatic feeding by elastic recovery of the fixture, whose structure has been delicately designed. In order to
ensure small lapping force and relatively high natural frequency, both static and modal analysis of the fixture has been
done by ANSYS, the results was in good accordance with experiments. Lapping experiments have showed that this
device can remove metamorphic layer efficiently as well as obtain good surface quality at the same time.
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