Prof. Shisheng Xiong Profile

Prof. Shisheng Xiong

at Fudan Univ

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 10 December 2024 Paper

Integration of deep learning for nonlinear spectral decomposition of in situ interfaces analysis

Jingyu Chen, Puzhen Li, Yudan Su, Weixuan Zeng, Shisheng Xiong

Proceedings Volume 13423, 134231P (2024) https://doi.org/10.1117/12.3055530

KEYWORDS: Sum frequency generation, Interfaces, Deep learning, Thin films, Spectroscopy, Signal intensity, Signal attenuation, Polystyrene, Optical surfaces, Vibration

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Proceedings Article | 10 December 2024 Paper

Quadruple-hole multiplication by directed self-assembly of block copolymer

Zhiyong Wu, Jiacheng Luo, Qingshu Dong, Jiaxiang Li, Xingran Xu, Zili Li, Weihua Li, Yan Zhang, Shisheng Xiong

Proceedings Volume 13423, 134231O (2024) https://doi.org/10.1117/12.3055274

KEYWORDS: Directed self assembly, Block copolymers, Lithography, Simulations, Double patterning technology, Polymethylmethacrylate, Fabrication, Critical dimension metrology, Photomasks

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Proceedings Article | 10 December 2024 Paper

Influence of sidewall affinity on the directed self-assembly for contact hole multiplication

Jiacheng Luo, Zhiyong Wu, Zili Li, Yan Zhang, Shengxiang Ji, Shisheng Xiong

Proceedings Volume 13423, 134231M (2024) https://doi.org/10.1117/12.3055257

KEYWORDS: Block copolymers, Directed self assembly, Annealing, Polymethylmethacrylate, Scanning electron microscopy, Polymers, Fabrication

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Proceedings Article | 10 December 2024 Paper

Measurement and analysis algorithm for sub-30 nm patterns of hexagonal arrays in microphotography

Shengru Niu, Yiming Xu, Jing Zhou, Yichen Zhang, Weixuan Zeng, Shisheng Xiong

Proceedings Volume 13423, 134230P (2024) https://doi.org/10.1117/12.3052918

KEYWORDS: Critical dimension metrology, Scanning electron microscopy, Manufacturing, Contour extraction, Error analysis, Statistical analysis, Lithography, Optical lithography, Image segmentation, Analytical research

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SPIE Journal Paper | 19 December 2023

Multiple patterning via layout decomposition method for directed self-assembly lithography

Tao Zhang, Hengyu Zhou, Shisheng Xiong, Sikun Li

JM3, Vol. 22, Issue 04, 043001, (December 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.043001

KEYWORDS: Directed self assembly, Lithography, Optical lithography, Electron beam lithography, Block copolymers, Mathematical optimization, Design, Printing, Manufacturing, Very large scale integration

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