Piercing and cutting of polyimide film were investigated by our He-free CO2 laser excited by longitudinal pulsed discharge without pre-ionization. The samples were polyimide film with a thickness of 50 μm, 100 μm, 150 μm and 200 μm. The laser pulse was a short pulse with a tail and had a laser energy of 39.6 mJ, a spike pulse width of 384 ns, a tail length of 108 μs, and an energy ratio of the spike pulse to the pulse tail of 1:128 at a repetition rate of 200 Hz. The laser beam was circular flat-top shape. The laser beam was focused to a diameter of 508 μm, with a fluence per pulse of 19.4 J/cm2. The minimum total irradiation fluence required for piercing in the film with a thickness of 200 μm was 389 J/cm2. The minimum scanning speed required for cutting in the film with a thickness of 200 μm was 15 mm/s.
We investigated laser output characteristics depended on a discharge starting voltage, gas medium and a repetition rate in a longitudinally excited CO2 laser. A discharge tube with an inner diameter of 16 mm and a length of 80 cm was applied a high voltage with the rise time of about 200 ns. All laser pulse waveforms were a short laser pulse with a spike pulse and a pulse tail. In the 1:1:2 mixture of CO2/N2/He and at the repetition rate of 300 Hz, the laser energy was increased with the discharge starting voltage of up to 40.3 kV. However, in the 1:1:2 mixture of CO2/N2/He and at the repetition rate of 600 Hz, the laser energy was saturated with the discharge starting voltage of about 28.6 kV or more. The maximum energy was 14.2 mJ at a repetition rate of 600 Hz and a discharge starting voltage of 28.8 kV.
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