Dr. Shuaigang Xiao Profile

Dr. Shuaigang Xiao

Research Staff Member at Seagate Technology LLC

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Author

Publications (4)

Proceedings Article | 19 March 2015 Paper

Imprint directed self-assembly of cylinder-forming Si-containing block copolymer for 6nm half-pitch line patterning

Shuaigang Xiao, XiaoMin Yang, Yautzong Hsu, Kim Lee, David Kuo

Proceedings Volume 9423, 94230O (2015) https://doi.org/10.1117/12.2085986

KEYWORDS: Picosecond phenomena, Oxygen, Reactive ion etching, Optical lithography, Nanoimprint lithography, Etching, Plasma, Polymers, Plasma etching, Directed self assembly

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SPIE Journal Paper | 12 August 2014 Open Access

Fabrication of servo-integrated template for 1.5 Teradot/inch² bit patterned media with block copolymer directed assembly

XiaoMin Yang, Shuaigang Xiao, Yautzong Hsu, HongYing Wang, Justin Hwu, Philip Steiner, Koichi Wago, Kim Lee, David Kuo

JM3, Vol. 13, Issue 03, 031307, (August 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.3.031307

KEYWORDS: Servomechanisms, Beam propagation method, Scanning electron microscopy, Quartz, Magnetism, Nanoimprint lithography, Etching, Optical lithography, Lithography, Directed self assembly

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SPIE Journal Paper | 2 August 2013 Open Access

Directed self-assembly for high-density bit-patterned media fabrication using spherical block copolymers

Shuaigang Xiao, XiaoMin Yang, Kim Lee, Justin Hwu, Koichi Wago, David Kuo

JM3, Vol. 12, Issue 03, 031110, (August 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.3.031110

KEYWORDS: Spherical lenses, Magnetism, Picosecond phenomena, Servomechanisms, Quartz, Beam propagation method, Lithography, Nanoimprint lithography, Reactive ion etching, Directed self assembly

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Proceedings Article | 24 March 2006 Paper

Electron beam lithography for high aspect-ratio trench patterning in thick resist: Experimental and simulation results

Jianyun Zhou, Shuaigang Xiao, Werner Scholz, XiaoMin Yang

Proceedings Volume 6151, 61513E (2006) https://doi.org/10.1117/12.656516

KEYWORDS: Electron beam lithography, Optical simulations, Magnetism, Scattering, Point spread functions, Electron beams, Laser scattering, Head, Photoresist processing, Monte Carlo methods

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