Prof. Shuanghua Sun Profile

Prof. Shuanghua Sun

at National Institute of Metrology

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Author

Publications (6)

Proceedings Article | 12 March 2021 Paper

Research on large-scale plane coordinate measurement technology based on multi-axis synchronous laser interferometry

Shuhui Wang, Shuanghua Sun, Yanhui Kang, Fumin Zhang, Heyan Wang, Changjuan Lao

Proceedings Volume 11763, 1176335 (2021) https://doi.org/10.1117/12.2586486

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Proceedings Article | 15 October 2015 Paper

Circle parameters calibration and data analysis of two-dimensional shape photomask

Shuanghua Sun, Zi Xue, Heyan Wang

Proceedings Volume 9672, 96720Z (2015) https://doi.org/10.1117/12.2202906

KEYWORDS: Calibration, Photomasks, Charge-coupled devices, Precision calibration, Shape analysis, Interferometers, Data analysis, Imaging systems, Standards development, Objectives

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Proceedings Article | 6 March 2015 Paper

Experiment study on the characteristics of two-dimensional line scale working standard

Shuanghua Sun, Zi Xue, Heyan Wang

Proceedings Volume 9446, 944630 (2015) https://doi.org/10.1117/12.2181217

KEYWORDS: Standards development, Interferometers, Calibration, Photomasks, Charge-coupled devices, Optics manufacturing, Laser systems engineering, Precision optics, Sensors, Imaging systems

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Proceedings Article | 21 August 2014 Paper

A novel measuring device for step gauge

Shuanghua Sun, Xueping Shen, Lingding Zou, Hongtang Gao, Xiaoyou Ye

Proceedings Volume 9283, 92830D (2014) https://doi.org/10.1117/12.2069753

KEYWORDS: Sensors, Inductance, Interferometry, Interferometers, Calibration, Measurement devices, Motion measurement, Control systems, Environmental sensing, Laser applications

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Proceedings Article | 31 January 2013 Paper

Contact aiming system of 2m laser automatic interferometric comparator

Shuanghua Sun, Xiaoyou Ye, Lingding Zou, Hongtang Gao, Xiaochuan Gan, Xueping Shen

Proceedings Volume 8759, 875907 (2013) https://doi.org/10.1117/12.2014877

KEYWORDS: Sensors, Inductance, Interferometry, Interferometers, Signal processing, Laser systems engineering, Motion controllers, Motion measurement, Metrology, Microscopes

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Proceedings Article | 15 October 2012 Paper

High precision calibration for 2D optical standard

Shuanghua Sun, Xiaochuan Gan, Zi Xue, Xiaoyou Ye, Heyan Wang, Hongtang Gao

Proceedings Volume 8417, 84172H (2012) https://doi.org/10.1117/12.974263

KEYWORDS: Photomasks, Optics manufacturing, Calibration, Precision calibration, Edge detection, Interferometers, Optical calibration, Temperature metrology, Standards development, Glasses

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Showing 5 of 6 publications

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