We made a HfO2 nanoantenna from HfO2-thin films by using a combination of nanoimprint lithography and reactive ion etching. The nanoantenna comprising hexagonal lattice of HfO2 nanodisks sustains electric and magnetic surface lattice resonances (SLRs) in the UV region, originating from radiative coupling between the local electric and magnetic dipoles via in-plane diffraction or Rayleigh anomaly. We also crystallized the HfO2 nanoantenna by annealing. In spite of the crystallization, the refractive index did not change notably and thus the spectral shape of the SLR changed only slightly.
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