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Shuyu Li
at Peking Univ
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Publications (1)
Proceedings Article | 23 December 2013 Paper
Wafer-level vacuum packaging for an optical readout bi-material cantilever infrared FPA
Shuyu Li, Xiaoxiong Zhou, Xiaomei Yu
Proceedings Volume 9043, 90430C (2013) https://doi.org/10.1117/12.2038077
KEYWORDS: Staring arrays, Packaging, Semiconducting wafers, Infrared imaging, Wafer-level optics, Quartz, Interfaces, Gold, Infrared radiation, Scanning electron microscopy
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