Ms. Si-Hyun Kim Profile

Si-Hyun Kim

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 14 May 2004 Paper

Realization of sub-80nm small space patterning in ArF photolithography

Si-Hyun Kim, Hyung-Do Kim, Si-Hyeung Lee, Chang-Min Park, Man-Hyoung Ryoo, Gi-Sung Yeo, Jung-Hyeon Lee, Han-Ku Cho, Woo-Sung Han, Joo-Tae Moon

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.536340

KEYWORDS: Photoresist processing, Optical lithography, Resolution enhancement technologies, Lithography, Semiconducting wafers, Etching, Optical proximity correction, Chemical reactions, Critical dimension metrology, Materials processing

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Proceedings Article | 12 June 2003 Paper

Adaptability and validity of thin organic bottom antireflective coating (BARC) to sub-90-nm patterning in ArF lithography

Si-Hyun Kim, Si-Hyeung Lee, Gi-Sung Yeo, Jeong Hyeong Lee, Han-Ku Cho, Woo-Sung Han, Joo-Tae Moon

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485117

KEYWORDS: Etching, Reflectivity, Lithography, Chemical reactions, Optical lithography, Line edge roughness, Refractive index, Optical properties, Bottom antireflective coatings, Critical dimension metrology

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