We developed an optofluidic device containing a nanostructured substrate for surface enhanced Raman spectroscopy (SERS). The device is based on a silicon chip, on which structures were fabricated using electron lithography and wet etching to achieve a pattern of inverted pyramids on the surface, which was then covered by gold layer of defined thickness and roughness. The geometry of the surface allows localized plasmon oscillations to give rise to the SERS effect, in which the Raman spectral lines are intensified by the interaction of the plasmonic field with the electrons in the molecular bonds. The SERS substrate was enclosed in a microfluidic system from silicone polymer and glass, which allowed transport and precise mixing of fluids entering the chip, while preventing contamination or abrasion of the highly sensitive substrate. We used this device as a platform for quantitative detection of halogenated hydrocarbons such as 1,2,3-trichloropropane (TCP) in water in submillimolar concentrations. TCP is used in industry and it is a persistent environmental pollutant. The presented sensor allows fast and simple quantification of such molecules and it could contribute to environmental monitoring disciplines as well as enzymologic experiments with genetically engineered dehalogenases, which are potentially useful for bioremediation. This research is supported by Czech Science Foundation (CSF) 16-07965S, infrastructure was supported by MEYS (LO1212, LM2015055) and EC (CZ.1.05/2.1.00/01.0017).
Optofluidics, a research discipline combining optics and microfluidics, currently aspires to revolutionize the analysis of biological and chemical samples, e.g. for medicine, pharmacology, or molecular biology. In order to detect low concentrations of analytes in water, we have developed an optofluidic device containing a nanostructured substrate for surface enhanced Raman spectroscopy (SERS). The geometry of the gold surface allows localized plasmon oscillations to give rise to the SERS effect, in which the Raman spectral lines are intensified by the interaction of the plasmonic field with the electrons in the molecular bonds. The SERS substrate was enclosed in a microfluidic system, which allowed transport and precise mixing of the analyzed fluids, while preventing contamination or abrasion of the highly sensitive substrate. To illustrate its practical use, we employed the device for quantitative detection of persistent environmental pollutant 1,2,3-trichloropropane in water in submillimolar concentrations. The developed sensor allows fast and simple quantification of halogenated compounds and it will contribute towards the environmental monitoring and enzymology experiments with engineered haloalkane dehalogenase enzymes.
KEYWORDS: Etching, Deep reactive ion etching, Microelectromechanical systems, Silicon, Interferometers, Signal detection, Reactive ion etching, Laser systems engineering, Laser interferometry
The method of laser interferometry is presented appropriate for precise determination of the depth of etching in a deep reactive ion etching system (DRIE), primarily used for the manufacturing of micro-electro-mechanical systems (MEMS). The system uses previous interferometer designs developed at the Institute of Institute of Scientific Instruments of the CAS, v. v. i. (ISI). We designed and manufactured a measurement system for specific MEMS and its functionality verified with the KLATencor D-120 profilometer.
Phyllotaxy studies arrangements of biological entities, e.g. a placement of seeds in the flower head. Vogel (1979) presented a phyllotactic model based on series of seeds ordered along a primary spiral. This arrangement allows each seed to occupy the same area within a circular flower head. Recently, a similar arrangement of diffraction primitives forming a planar relief diffractive structure was presented. The planar relief structure was used for benchmarking and testing purposes of the electron beam writer patterning process. This contribution presents the analysis of local periods and azimuths of optical phyllotactic arrangements. Two kinds of network characteristic triangles are introduced. If the discussed planar structure has appropriate size and density, diffraction of the incoming light creates characteristic a phyllotactic diffraction pattern. Algorithms enabling the analysis of such behavior were developed and they were validated by fabricated samples of relief structures. Combined and higher diffraction orders are also analyzed. Different approaches enabling the creation of phyllotactic diffractive patterns are proposed. E–beam lithography is a flexible technology for various diffraction gratings origination. The e–beam patterning typically allows for the creation of optical diffraction gratings in the first diffraction order. Nevertheless, this technology enables also more complex grating to be prepared, e.g. blazed gratings and zero order gratings. Moreover, the mentioned kinds of gratings can be combined within one planar relief structure. The practical part of the presented work deals with the nano patterning of such structures by using two different types of the e–beam pattern generators.
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