Dr. Stephan Zimmermann Profile

Dr. Stephan Zimmermann

at Advanced Mask Technology Ctr GmbH Co KG

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 26 March 2019 Presentation + Paper

Vadim Sidorkin, Stephan Zimmermann, Stefan Proske, Michael Finken, G. Cantrell, Markus Bender

Proceedings Volume 10957, 109570K (2019) https://doi.org/10.1117/12.2513666

KEYWORDS: Extreme ultraviolet, Photomasks, Metrology, Electron beam lithography, Reticles

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Keywords/Phrases