Mr. Steven Hou Jang Lee Profile

Steven Hou Jang Lee

at Institute of Microelectronics

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Publications (2)

Proceedings Article | 15 March 2024 Presentation + Paper

Material characterization of silicon dioxide cladding for photonic devices

Amy S. Tong, Doris K. Ng, Roshan Kanhirakkottil, Jia Sheng Goh, Jiamu Jin, Andrew W. Fong, Steven H. Lee, Hong Cai, Lennon Y. Lee

Proceedings Volume 12887, 128870E (2024) https://doi.org/10.1117/12.3001995

KEYWORDS: Refractive index, Cladding, Plasma enhanced chemical vapor deposition, Coating stress, Silica, Low pressure chemical vapor deposition, Surface roughness, Waveguides, Semiconducting wafers, Photonic devices

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Proceedings Article | 13 March 2024 Presentation + Paper

Low-loss 800nm-thick PECVD silicon nitride photonic platform on 300-mm wafer

Hong Cai, Bo Li, Yiding Lin, Haitao Yu, Steven Hou Jang Lee, Chin Khang Tew, Jae Ok Yoo, Charmaine Goh, Shervonne Woon, Doris Keh Ting Ng, Navab Singh, Xianshu Luo, Lennon Yao Ting Lee

Proceedings Volume 12898, 1289802 (2024) https://doi.org/10.1117/12.3002146

KEYWORDS: Silicon nitride, Waveguides, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Silicon photonics, Film thickness, Fabrication, Chemical mechanical planarization, Photonic integrated circuits

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