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Suman Addya
at Univ of Delaware
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Publications (1)
Proceedings Article | 27 March 2013 Paper
Progress towards dual vertical slot modulator for millimeter wave photonics
Stephen Kozacik, Maciej Murakowski, Matthew Konkol, Suman Addya, David L. Eng, Benjamin Olbricht, Mathew Zablocki, Ahmed Sharkawy, Janusz Murakowski, Shouyuan Shi, Dennis Prather
Proceedings Volume 8624, 86240Y (2013) https://doi.org/10.1117/12.2004978
KEYWORDS: Silicon, Waveguides, Modulators, Etching, Electron beam lithography, Photomasks, Optical alignment, Lithography, Photonics, Titanium dioxide
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