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Dr. Sybille Hopman
at Fraunhofer-ISE
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 23 February 2010 Paper
Microstructuring and wafering of silicon with laser chemical processing
Sybille Hopman, Andreas Fell, Kuno Mayer, Andreas Rodofili, Filip Granek
Proceedings Volume 7585, 75850S (2010) https://doi.org/10.1117/12.841340
KEYWORDS: Resistance, Doping, Solar cells, Silicon, Laser processing, Liquids, Chemical lasers, Pulsed laser operation, Laser induced damage, Phosphorus
Conference Committee Involvement (1)
Laser-based Micro- and Nanopackaging and Assembly V
26 January 2011 | San Francisco, California, United States
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