Dr. Sylvain Petitgrand Profile

Dr. Sylvain Petitgrand

at Fogale Nanotech

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Author

Publications (9)

Proceedings Article | 29 August 2005 Paper

Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis

Cedric Breluzeau, Alain Bosseboeuf, Sylvain Petitgrand, Xavier Leroux

Proceedings Volume 5858, 58580B (2005) https://doi.org/10.1117/12.612270

KEYWORDS: Demodulation, Fourier transforms, Fringe analysis, Microscopy, Modulation, Anisotropic filtering, Binary data, Interferometry, Phase shift keying, Optical filters

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Proceedings Article | 13 June 2005 Paper

Assessment of technology and (thermo)mechanical behaviour of MEMS devices by interference microscopy

Alain Bosseboeuf, Cedric Breluzeau, Sylvain Petitgrand

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.621584

KEYWORDS: Microscopy, Microelectromechanical systems, Interferometry, Objectives, Silicon, Light sources, Etching, Microscopes, 3D metrology, Phase measurement

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Proceedings Article | 17 August 2004 Paper

Application of the vortex transform to microscopic interferometry

Sylvain Petitgrand, Alain Bosseboeuf, Matthieu Guirardel

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545509

KEYWORDS: Fringe analysis, Interferometry, Fourier transforms, Demodulation, Mirrors, Light sources, Nanotechnology, Phase shifts, 3D metrology, Statistical analysis

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Proceedings Article | 3 October 2003 Paper

Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination

Sylvain Petitgrand, Alain Bosseboeuf

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500138

KEYWORDS: Interferometry, Phase measurement, Laser phosphor displays, Phase shifts, 3D metrology, Optical testing, Microelectromechanical systems, Measurement devices, Error analysis, Light sources

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Proceedings Article | 3 October 2003 Paper

Application of microscopic interferometry techniques in the MEMS field

Alain Bosseboeuf, Sylvain Petitgrand

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500134

KEYWORDS: Interferometry, Microelectromechanical systems, Silicon, 3D metrology, Reflection, Interfaces, Objectives, Light sources, Refractive index, Video

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Proceedings Article | 3 October 2003 Paper

Study of subpixel image processing algorithms for MEMS in-plane vibration measurements by stroboscopic microscopy

Adel Hafiane, Sylvain Petitgrand, Olivier Gigan, Samia Bouchafa, Alain Bosseboeuf

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500141

KEYWORDS: Image processing, Microelectromechanical systems, Gaussian filters, Vibrometry, Motion measurement, Video, Microscopy, Image resolution, Motion estimation, Optical flow

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Proceedings Article | 23 October 2001 Paper

Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization

Sylvain Petitgrand, Reda Yahiaoui, Alain Bosseboeuf, Kamran Danaie

Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445605

KEYWORDS: Interferometry, Spatial resolution, Ferroelectric materials, Bessel functions, Light sources, Visualization, Mirrors, CCD cameras, Objectives, Aluminum

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Proceedings Article | 23 October 2001 Paper

Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry

Alain Bosseboeuf, Philippe Nerin, Pascal Vabre, Sylvain Petitgrand, Reda Yahiaoui

Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445603

KEYWORDS: Interferometry, 3D metrology, Microelectromechanical systems, Objectives, Light emitting diodes, Light sources, Ferroelectric materials, Mirrors, Microrings, Spatial resolution

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Proceedings Article | 23 October 2001 Paper

Automated interferometric system for bulge and blister test measurements of micromachined membranes

Reda Yahiaoui, Kamran Danaie, Sylvain Petitgrand, Alain Bosseboeuf

Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445600

KEYWORDS: Silicon, Interferometry, Signal processing, Photomultipliers, Molybdenum, Objectives, 3D metrology, Spatial resolution, Phase modulation, Sodium

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Showing 5 of 9 publications

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