Mr. Tae-Hwang Jang Profile

Tae-Hwang Jang

Engineer at Samsung Electronics Co Ltd

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Publications (1)

Proceedings Article | 17 December 2003 Paper

Efficient mask data preparation for variable shaped e-beam writing system focusing on memory devices

Tae Jang, Jong-Bae Lee, Jae-Pil Shin, Kwang-Jai Yoo, Dai-Hyun Jung, Yong-Hee Park, Moon-Hyun Yoo, Jeong-Taek Kong

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.517828

KEYWORDS: Data conversion, Data processing, Vestigial sideband modulation, Computer aided design, Critical dimension metrology, Mask making, Resolution enhancement technologies, Control systems, Raster graphics, Manufacturing

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