Mr. Takaaki Kuribayashi Profile

Takaaki Kuribayashi

at Renesas Electronics Corp

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Author

Publications (2)

Proceedings Article | 20 April 2011 Paper

CD uniformity improvement of through-pitch contact-hole patterning for advanced logic devices

Takaaki Kuribayashi, Yoshinori Matsui, Kazuyuki Yoshimochi, Seiji Nagahara, Takayuki Uchiyama

Proceedings Volume 7971, 79711P (2011) https://doi.org/10.1117/12.879589

KEYWORDS: Etching, Lithography, Critical dimension metrology, Semiconducting wafers, Logic devices, Spatial resolution, Cadmium, Optical lithography, Resistance, Process control

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Proceedings Article | 16 March 2009 Paper

32nm node device laser-bandwidth OPE sensitivity and process matching

Kazuyuki Yoshimochi, Takao Tamura, Takaaki Kuribayashi, Takayuki Uchiyama, Nigel Farrar, Toshihiro Oga, James Bonafede

Proceedings Volume 7274, 72742Q (2009) https://doi.org/10.1117/12.813987

KEYWORDS: SRAF, Logic devices, Critical dimension metrology, Optical simulations, Laser stabilization, Light sources, Combined lens-mirror systems, Computer simulations, Laser cutting, Tolerancing

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