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Takayoshi Tsuchiya
at Meijo Univ
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Publications (1)
Proceedings Article | 4 March 2013 Paper
Fabrication and characterization of nitride-based blue light-emitting diodes on moth-eye patterned sapphire substrate (MPSS)
T. Tsuchiya, S. Umeda, Mihoko Sowa, T. Kondo, T. Kitano, M. Mori, A. Suzuki, K. Naniwae, H. Sekine, M. Iwaya, T. Takeuchi, S. Kamiyama, I. Akasaki
Proceedings Volume 8641, 86410J (2013) https://doi.org/10.1117/12.2003527
KEYWORDS: Light emitting diodes, Sapphire, Gallium nitride, Etching, Antireflective coatings, Patterned sapphire substrate, Blue light emitting diodes, Dry etching, External quantum efficiency, Wet etching
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