KEYWORDS: Mirrors, Distortion, Control systems, Ray tracing, Laser drilling, Signal detection, Laser processing, Error analysis, Error control coding, Resonators
A position difference from a theoretical one by ray tracing on the imaging plane has taken place due to a distortion by using f θ lens in this optical system, which has been able to be compensated by returning a correction value acquired from accurate theoretical calculations to the control system. This paper will describe the system and control of this equipment.
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