Mr. Takeo Omori Profile

Takeo Omori

at Nikon Corp

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Author

Publications (3)

Proceedings Article | 10 May 2005 Paper

Novel inspection technology for half pitch 55 nm and below

Takeo Omori, Kazuhiko Fukazawa, Toru Mikami, Kiminori Yoshino, Yuichiro Yamazaki

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599178

KEYWORDS: Semiconducting wafers, Inspection, Reflectivity, Birefringence, Polarization, Image processing, Wafer testing, Dielectric polarization, Dielectrics

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Proceedings Article | 2 June 2000 Paper

Automatic macro inspection system

Toshiaki Kitamura, Yasuharu Nakajima, Hiroyuki Matsumoto, Takeo Omori, Koichiro Komatsu

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386514

KEYWORDS: Semiconducting wafers, Inspection, Diffraction, Image processing, Imaging systems, Defect detection, Wafer-level optics, Defect inspection, Wafer inspection, Photoresist processing

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Proceedings Article | 14 June 1999 Paper

Automatic macroinspection system

Koichiro Komatsu, Takeo Omori, Toshiaki Kitamura, Yasuharu Nakajima, Arun Aiyer, Kyoichi Suwa

Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350863

KEYWORDS: Semiconducting wafers, Inspection, Light scattering, Wafer-level optics, Fourier transforms, Defect detection, Wafer inspection, Particles, CCD cameras, Cameras

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