Dr. Takeshi Ohmori Profile

Dr. Takeshi Ohmori

at Hitachi, Ltd

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Publications (1)

Proceedings Article | 29 September 2023 Paper

Automated measurement method with human-pose estimation model for cross-sectional SEM images of semiconductor devices

Yutaka Okuyama, Takeshi Ohmori

Proceedings Volume 12915, 129150J (2023) https://doi.org/10.1117/12.2683762

KEYWORDS: Scanning electron microscopy, Education and training, Etching, Time metrology, Semiconductors, Image segmentation, Statistical modeling, Instrument modeling, Critical dimension metrology, Silicon, Deep learning, Feature extraction

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