Dr. Yan Tang Profile

Dr. Yan Tang

at Institute of Optics and Electronics CAS

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Author

Publications (10)

Proceedings Article | 24 November 2021 Paper

Application of structured illumination microscopy in fast and accurate measurement of complex-surface and steep-edge

Lei Liu, Tang Yan, Song Hu

Proceedings Volume 12066, 120660U (2021) https://doi.org/10.1117/12.2604945

KEYWORDS: Modulation, Fringe analysis, Microscopy, Fourier transforms, Phase shifts, Phase shift keying, Confocal microscopy, Charge-coupled devices, Mirrors, Digital micromirror devices

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SPIE Journal Paper | 15 October 2021 Open Access

Accurate and stable two-step LED position calibration method for Fourier ptychographic microscopy

Haojie Wei, Jing Du, Lei Liu, Yu He, Yong Yang, Song Hu, Yan Tang

JBO, Vol. 26, Issue 10, 106502, (October 2021) https://doi.org/10.1117/12.10.1117/1.JBO.26.10.106502

KEYWORDS: Light emitting diodes, Calibration, Reconstruction algorithms, Microscopy, Lawrencium, Image restoration, Image processing, Error analysis, Optical arrays, Imaging systems

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Proceedings Article | 6 February 2019 Paper

Design of bifocal compound eyes and gray mask fabrication based on maskless photolithography

Jianghui Liu, Junbo Liu, Qingyuan Deng, Yan Tang, Song Hu

Proceedings Volume 10842, 108421B (2019) https://doi.org/10.1117/12.2505369

KEYWORDS: Optical lithography, Photomasks, Digital micromirror devices, Microlens, Micromirrors

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Proceedings Article | 30 January 2019 Paper

Efficient super-resolution imaging method for micro-nano structure based on structured illumination modulation

Kejun Yang, Yan Tang, Song Hu, Chuyi Chen

Proceedings Volume 10841, 108410H (2019) https://doi.org/10.1117/12.2512326

KEYWORDS: Super resolution, Modulation, Diffraction, Reconstruction algorithms

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Proceedings Article | 30 January 2019 Paper

Investigation of microsphere-assisted super-resolution imaging

Xi Liu, Yan Tang, Yi Zhou, Song Hu

Proceedings Volume 10841, 1084107 (2019) https://doi.org/10.1117/12.2505744

KEYWORDS: Super resolution, Silica, Optical spheres, Refractive index, Near field optics, Photonic nanostructures, Visible radiation, Microscopy, Image resolution, Optical microscopes

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Proceedings Article | 30 January 2019 Paper

Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy

Zhongye Xie, Yan Tang, Xi Liu, Kejun Yang, Song Hu

Proceedings Volume 10841, 1084105 (2019) https://doi.org/10.1117/12.2505137

KEYWORDS: Thin films, Modulation, Microscopy, Fourier transforms, Thin film devices, Phase shifts, Optoelectronic devices, Interferometry, Semiconducting wafers, Optical components

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Proceedings Article | 23 August 2017 Presentation + Paper

Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry

Yi Zhou, Yan Tang, Qinyuan Deng, Lixin Zhao, Song Hu

Proceedings Volume 10373, 103730G (2017) https://doi.org/10.1117/12.2280001

KEYWORDS: Modulation, Dimensional metrology, Interferometry, Integrated circuits, Chemistry

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SPIE Journal Paper | 1 November 2012

Alignment method based on matched dual-grating moiré fringe for proximity lithography

Jiangping Zhu, Song Hu, Jungsheng Yu, Yan Tang

OE, Vol. 51, Issue 11, 113603, (November 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.11.113603

KEYWORDS: Optical alignment, Lithography, Fringe analysis, Semiconducting wafers, Optical engineering, Electronics, Error analysis, Moire patterns, Optoelectronics, Imaging systems

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Proceedings Article | 15 October 2012 Paper

Properties of Photon Sieve Diffraction Based on FDTD Method

Yu He, Lixin Zhao, Song Hu, Mingyong Chen, Yan Tang

Proceedings Volume 8418, 84180A (2012) https://doi.org/10.1117/12.971466

KEYWORDS: Diffraction, Finite-difference time-domain method, Analytical research, Magnetism, Numerical simulations, Photonic microstructures, Maxwell's equations, Zone plates, Optics manufacturing, Opacity

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Proceedings Article | 15 October 2012 Paper

Maskless lithography alignment method based on phase-shifting Moiré fringes technique

Jiangping Zhu, Song Hu, Jungshen Yu, Yan Tang

Proceedings Volume 8418, 84180L (2012) https://doi.org/10.1117/12.971463

KEYWORDS: Optical alignment, Phase shifts, Semiconducting wafers, Maskless lithography, Lithography, Digital micromirror devices, Superposition, Fourier transforms, Computer simulations, Imaging arrays

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Showing 5 of 10 publications

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