Mr. Terence C. Barrett Profile

Terence C. Barrett

Development Engineer

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Publications (2)

Proceedings Article | 14 September 2001 Paper

Depth-of-focus analysis of subwavelength features

Terence Barrett

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435704

KEYWORDS: Monochromatic aberrations, Data modeling, Error analysis, Critical dimension metrology, Lithography, Semiconducting wafers, Imaging systems, Visualization, Projection systems, Optics manufacturing

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Proceedings Article | 5 July 2000 Paper

Impact of illumination pupil-fill spatial variation on simulated imaging performance

Terence Barrett

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389074

KEYWORDS: Lithographic illumination, Diffraction, Monochromatic aberrations, Logic, Projection lithography, Lithography, Device simulation, Fiber optic illuminators, Imaging systems, Semiconducting wafers

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