Dr. Thilo Sandner Profile

Dr. Thilo Sandner

Group Manager Microscanner

SPIE Involvement:

Conference Program Committee | Author

Publications (57)

Proceedings Article | 12 March 2024 Poster + Paper

Vectorial micro scanning mirror for fast beam positioning of a compact medical therapy laser

Thilo Sandner, Thomas Graßhoff, Markus Schwarzenberg, Klemens Birnbaum, Tino Pügner, Jan Grahmann

Proceedings Volume 12899, 128990R (2024) https://doi.org/10.1117/12.3007365

KEYWORDS: Microelectromechanical systems, Mirrors, Design, Scanners, Laser therapeutics, Coating, Position sensors, Laser scanners, Semiconducting wafers, Piezoresistivity

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Proceedings Article | 15 March 2023 Poster + Paper

Wafer-level vacuum packaged translatory MEMS mirror with large stroke for compact NIR-FT spectrometers

Thilo Sandner, Eric Gaumont, Thomas Graßhoff, Andreas Rieck, Tobias Seifert, Gerald Auböck, Jan Grahmann

Proceedings Volume 12434, 124340X (2023) https://doi.org/10.1117/12.2668624

KEYWORDS: Deformable mirrors, Semiconducting wafers, Protactinium, Deformation

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Proceedings Article | 15 March 2023 Poster + Paper

2D MEMS vector scanning mirrors for LIDAR, medical imaging, and high laser power applications

Thilo Sandner, Benjamin Mustin, Klemens Birnbaum, Martin Blasl, Thomas Graßhoff, Markus Schwarzenberg, Jan Grahmann

Proceedings Volume 12434, 124340W (2023) https://doi.org/10.1117/12.2668618

KEYWORDS: Electromagnetism, Silicon, Semiconducting wafers

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SPIE Journal Paper | 31 January 2022 Open Access

Histogram formation and noise reduction in biaxial MEMS-based SPAD light detection and ranging systems

Roman Burkard, Manuel Ligges, André Merten, Thilo Sandner, Reinhard Viga, Anton Grabmaier

JOM, Vol. 2, Issue 01, 011005, (January 2022) https://doi.org/10.1117/12.10.1117/1.JOM.2.1.011005

KEYWORDS: Sensors, LIDAR, Signal processing, Data processing, Denoising, Photons, Scanners, Optical microsystems, Microelectromechanical systems, Signal detection

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SPIE Journal Paper | 8 January 2022 Open Access

System integration of hybrid assembled large aperture Micro Scanner Array for fast scanning LiDAR sensors

Thilo Sandner, Thomas Graßhoff, Wolf-Dietrich Owe, Andreas Herrmann, Michael Wildenhain, Markus Schwarzenberg, Jan Grahmann

JOM, Vol. 2, Issue 01, 011004, (January 2022) https://doi.org/10.1117/12.10.1117/1.JOM.2.1.011004

KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, LIDAR, System integration, Distance measurement, Receivers, 3D-TOF imaging, Sensors, Laser scanners

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Proceedings Article | 28 February 2020 Paper

System integration of hybrid large aperture micro scanner array for fast scanning LiDAR sensors

Thilo Sandner, Thomas Graßhoff, Wolf-Dietrich Owe, Andreas Herrmann, Michael Wildenhain, Markus Schwarzenberg

Proceedings Volume 11293, 112930Z (2020) https://doi.org/10.1117/12.2566185

KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, LIDAR, Distance measurement, Sensors, Receivers, 3D-TOF imaging, Laser scanners, Cameras

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Proceedings Article | 21 March 2018 Presentation + Paper

Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers

Thilo Sandner, Eric Gaumont, Thomas Grasshoff, Gerald Auböck, Andreas Kenda, Thomas Gisler, Sergiu Langa, Andreas Herrmann, Jan Grahmann

Proceedings Volume 10545, 105450W (2018) https://doi.org/10.1117/12.2290588

KEYWORDS: Mirrors, Semiconducting wafers, Glasses, Protactinium

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Proceedings Article | 22 February 2018 Presentation + Paper

Repetitive nonlinear control for linear scanning micro mirrors

Richard Schroedter, Markus Schwarzenberg, Jan Grahmann, Thilo Sandner, Klaus Janschek

Proceedings Volume 10545, 1054511 (2018) https://doi.org/10.1117/12.2285558

KEYWORDS: Mirrors, Nonlinear control, Micromirrors, Feedback control, Teeth, Piezoresistive sensors, Control systems, Sensors, Optical coherence tomography, Scalable video coding

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Proceedings Article | 20 February 2017 Presentation + Paper

Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback

Richard Schroedter, Markus Schwarzenberg, André Dreyhaupt, Robert Barth, Thilo Sandner, Klaus Janschek

Proceedings Volume 10116, 1011605 (2017) https://doi.org/10.1117/12.2251802

KEYWORDS: Amplifiers, Sensors, Linear filtering, Mirrors, Micromirrors, Error analysis, Microcontrollers, Digital filtering, Analog electronics, Feedback control, Raster graphics, Control systems, Head

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Proceedings Article | 15 March 2016 Paper

Real-time closed-loop control for micro mirrors with quasistatic comb drives

Richard Schroedter, Thilo Sandner, Klaus Janschek, Matthias Roth, Clemens Hruschka

Proceedings Volume 9760, 976009 (2016) https://doi.org/10.1117/12.2208431

KEYWORDS: Mirrors, Micromirrors, Nonlinear control, Control systems, Sensors, Systems modeling, Manufacturing, Scalable video coding, Mechatronics, Complex systems, Raster graphics, Error control coding, Capacitance

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Proceedings Article | 15 March 2016 Paper

MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies

Jan Grahmann, André Dreyhaupt, Christian Drabe, Richard Schrödter, Jörg Kamenz, Thilo Sandner

Proceedings Volume 9760, 976006 (2016) https://doi.org/10.1117/12.2212965

KEYWORDS: Sensors, Micromirrors, Signal to noise ratio, Scanners, Wheatstone bridges, Bridges, Sensor technology, Resistance

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Proceedings Article | 25 March 2015 Paper

Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera

Thilo Sandner, Claudia Baulig, Thomas Grasshoff, Michael Wildenhain, Markus Schwarzenberg, Hans-Georg Dahlmann, Stefan Schwarzer

Proceedings Volume 9375, 937505 (2015) https://doi.org/10.1117/12.2076440

KEYWORDS: Mirrors, Microelectromechanical systems, Scanners, Stereoscopic cameras, Distance measurement, Laser scanners, 3D-TOF imaging, Cameras, Sensors, Receivers

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Proceedings Article | 21 May 2014 Paper

Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

A. Kenda, M. Kraft, A. Tortschanoff, Werner Scherf, T. Sandner, Harald Schenk, Stephan Luettjohann, A. Simon

Proceedings Volume 9101, 910102 (2014) https://doi.org/10.1117/12.2053347

KEYWORDS: Microelectromechanical systems, Spectrometers, Mirrors, Signal to noise ratio, Sensors, FT-IR spectroscopy, Spectral resolution, Near infrared, Packaging, System integration

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Proceedings Article | 21 May 2014 Paper

Optical design of MOEMS-based micro-mechatronic modules for applications in spectroscopy

A. Tortschanoff, M. Kremer, T. Sandner, A. Kenda

Proceedings Volume 9101, 910109 (2014) https://doi.org/10.1117/12.2053001

KEYWORDS: Microopto electromechanical systems, Mirrors, Scanners, Spectroscopes, Electronics, Control systems, Diodes, Optical design, Sensors, Optical sensing

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SPIE Journal Paper | 20 March 2014

Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers

Thilo Sandner, Thomas Grasshoff, Eric Gaumont, Harald Schenk, Andreas Kenda

JM3, Vol. 13, Issue 01, 011115, (March 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011115

KEYWORDS: Microelectromechanical systems, Mirrors, Protactinium, Fourier transforms, Microopto electromechanical systems, Actuators, System integration, Spectrometers, FT-IR spectroscopy, Prototyping

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Proceedings Article | 8 March 2014 Paper

Micro-scanning mirrors for high-power laser applications in laser surgery

Thilo Sandner, Simon Kimme, Thomas Grasshoff, Ulrich Todt, Alexander Graf, Cristian Tulea, Achim Lenenbach, Harald Schenk

Proceedings Volume 8977, 897705 (2014) https://doi.org/10.1117/12.2042671

KEYWORDS: Mirrors, Microelectromechanical systems, Scanners, Laser cutting, Magnetism, Laser scanners, 3D scanning, Reflectivity, Optical coatings, Dielectrics

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Proceedings Article | 8 March 2014 Paper

Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

Thilo Sandner, Thomas Grasshoff, Markus Schwarzenberg, Richard Schroedter, Harald Schenk

Proceedings Volume 8977, 897717 (2014) https://doi.org/10.1117/12.2064898

KEYWORDS: Mirrors, Microelectromechanical systems, Stereoscopic cameras, Sensors, 3D-TOF imaging, Laser scanners, Distance measurement, Cameras, 3D metrology, Raster graphics

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SPIE Journal Paper | 20 February 2014

Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera

Thilo Sandner, Thomas Grasshoff, Markus Schwarzenberg, Richard Schroedter, Harald Schenk

JM3, Vol. 13, Issue 01, 011114, (February 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011114

KEYWORDS: Mirrors, Microelectromechanical systems, Cameras, Stereoscopic cameras, 3D scanning, 3D-TOF imaging, Sensors, 3D acquisition, Distance measurement, Raster graphics

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Proceedings Article | 17 May 2013 Paper

Optical position feedback of quasi-static 2D MOEMS mirrors

A. Tortschanoff, M. Baumgart, D. Holzmann, M. Lenzhofer, T. Sandner, A. Kenda

Proceedings Volume 8763, 87630J (2013) https://doi.org/10.1117/12.2016852

KEYWORDS: Mirrors, Sensors, Microopto electromechanical systems, Diodes, Microelectromechanical systems, Optical simulations, Scanners, Light emitting diodes, Light sources, Signal detection

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Proceedings Article | 13 March 2013 Paper

Closed-loop control driver for quasi-static MOEMS mirrors

A. Tortschanoff, D. Holzmann, M. Lenzhofer, T. Sandner, A. Kenda

Proceedings Volume 8616, 861619 (2013) https://doi.org/10.1117/12.2004167

KEYWORDS: Mirrors, Microopto electromechanical systems, Electrodes, Control systems, Amplifiers, Scanners, Microcontrollers, Feedback signals, Device simulation, Electronics

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Proceedings Article | 18 December 2012 Paper

Design of an optical position detection unit for fast 2D-MOEMS scanners

A. Tortschanoff, T. Sandner, A. Kenda

Proceedings Volume 8550, 85501F (2012) https://doi.org/10.1117/12.979930

KEYWORDS: Mirrors, Microopto electromechanical systems, Optical design, Sensors, Scanners, Photodiodes, Diodes, Electronics, Control systems, Domes

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Proceedings Article | 9 May 2012 Paper

Micromirror-based sending and detection optical assembly for time-of-flight laser scanners

Britta Satzer, Claudia Baulig, Thilo Sandner, Stefan Schwarzer

Proceedings Volume 8439, 84390Z (2012) https://doi.org/10.1117/12.922764

KEYWORDS: Mirrors, Sensors, Micromirrors, Beam splitters, Prisms, Glasses, Domes, Laser scanners, Cameras, Optical fabrication

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Proceedings Article | 18 February 2012 Paper

Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers

Thilo Sandner, Thomas Grasshoff, Harald Schenk, Andreas Kenda

Proceedings Volume 8252, 82520C (2012) https://doi.org/10.1117/12.909817

KEYWORDS: Microelectromechanical systems, Mirrors, Microopto electromechanical systems, Actuators, Prototyping, Spectrometers, FT-IR spectroscopy, Fourier transforms, Protactinium, System integration

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Proceedings Article | 16 February 2012 Paper

Closed-loop control for quasi-static MOEMS mirrors

A. Tortschanoff, D. Holzmann, M. Lenzhofer, T. Sandner

Proceedings Volume 8252, 82520T (2012) https://doi.org/10.1117/12.907825

KEYWORDS: Mirrors, Microopto electromechanical systems, Control systems, Scanners, Analog electronics, Microcontrollers, Microelectromechanical systems, Digital signal processing, Actuators, Amplifiers

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Proceedings Article | 16 February 2012 Paper

Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications

Denis Jung, Thilo Sandner, David Kallweit, Harald Schenk

Proceedings Volume 8252, 82520U (2012) https://doi.org/10.1117/12.906690

KEYWORDS: Mirrors, Semiconducting wafers, Electrodes, Wafer bonding, Scalable video coding, Scanners, Beam steering, Micromirrors, Laser applications, Instrument modeling

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Proceedings Article | 16 February 2012 Paper

Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirror

Andreas Kenda, Thilo Sandner, Stephan Lüttjohann, Martin Kraft, Andreas Tortschanoff, Arno Simon

Proceedings Volume 8252, 82520D (2012) https://doi.org/10.1117/12.908273

KEYWORDS: Mirrors, Microopto electromechanical systems, Spectroscopy, Signal to noise ratio, FT-IR spectroscopy, Sensors, Interferometers, Mid-IR, Spectral resolution, Microelectromechanical systems

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Proceedings Article | 16 February 2012 Paper

Optical position feedback for electrostatically driven MOEMS scanners

A. Tortschanoff, M. Baumgart, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 8252, 82520S (2012) https://doi.org/10.1117/12.907761

KEYWORDS: Mirrors, Microopto electromechanical systems, Diodes, Scanners, Sensors, Photodiodes, Microelectromechanical systems, Photodetectors, Error analysis, Motion measurement

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SPIE Journal Paper | 1 July 2011

Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes

Andreas Tortschanoff, Albert Frank, Michael Wildenhain, Thilo Sandner, Andreas Kenda

JM3, Vol. 10, Issue 03, 033006, (July 2011) https://doi.org/10.1117/12.10.1117/1.3609230

KEYWORDS: Mirrors, Microopto electromechanical systems, Control systems, Scanners, Computer programming, Diodes, Electronics, Sensors, Photodiodes, Microelectromechanical systems

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Proceedings Article | 12 May 2011 Paper

A compact and portable IR analyzer: progress of a MOEMS FT-IR system for mid-IR sensing

Andreas Kenda, Stephan Lüttjohann, Thilo Sandner, Martin Kraft, Andreas Tortschanoff, Arno Simon

Proceedings Volume 8032, 80320O (2011) https://doi.org/10.1117/12.883841

KEYWORDS: Microopto electromechanical systems, Mirrors, Spectrometers, FT-IR spectroscopy, Spectral resolution, Sensors, Interferometers, Infrared sensors, Mid-IR, Sensing systems

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Proceedings Article | 5 May 2011 Paper

Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

A. Tortschanoff, A. Frank, M. Lenzhofer, M. Wildenhain, T. Sandner, A. Kenda

Proceedings Volume 8066, 80660O (2011) https://doi.org/10.1117/12.886481

KEYWORDS: Mirrors, Microelectromechanical systems, Diodes, Electronics, Control systems, Scanners, Computer programming, Microopto electromechanical systems, Silicon, Photodiodes

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Proceedings Article | 14 February 2011 Paper

Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation

Thilo Sandner, Thomas Grasshoff, Harald Schenk, Andreas Kenda

Proceedings Volume 7930, 79300I (2011) https://doi.org/10.1117/12.879069

KEYWORDS: Microelectromechanical systems, Mirrors, Prototyping, Actuators, FT-IR spectroscopy, Microopto electromechanical systems, Protactinium, Modulation, Spectrometers, Packaging

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Proceedings Article | 14 February 2011 Paper

Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

Jan Grahmann, Thomas Graßhoff, Holger Conrad, Thilo Sandner, Harald Schenk

Proceedings Volume 7930, 79300V (2011) https://doi.org/10.1117/12.874979

KEYWORDS: Sensors, Mirrors, Resistance, Bridges, Micromirrors, Piezoresistive sensors, Silicon, Resistors, Doping, Crystals

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Proceedings Article | 14 February 2011 Paper

Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners

A. Tortschanoff, A. Frank, M. Wildenhain, H. Tetikol, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 7930, 79300S (2011) https://doi.org/10.1117/12.873261

KEYWORDS: Mirrors, Microopto electromechanical systems, Electronics, Microelectromechanical systems, Scanners, Control systems, Photodiodes, Sensors, Digital signal processing, Diodes

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Proceedings Article | 18 February 2010 Paper

Miniaturized MEMS-based spectrometric sensor for process control and analysis of carbonated beverages

A. Kenda, M. Kraft, A. Tortschanoff, Ch. Wagner, B. Lendl, T. Sandner, H. Schenk

Proceedings Volume 7594, 75940U (2010) https://doi.org/10.1117/12.841957

KEYWORDS: Spectrometers, Microelectromechanical systems, Sensors, Mirrors, Carbon dioxide, Calibration, Spectral resolution, Absorption, FT-IR spectroscopy, Spectroscopy

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Proceedings Article | 18 February 2010 Paper

Synchronized microscanner array for large aperture receiver optics of LIDAR systems

Thilo Sandner, Thomas Grasshoff, Michael Wildenhain, Harald Schenk

Proceedings Volume 7594, 75940C (2010) https://doi.org/10.1117/12.844923

KEYWORDS: Scanners, Mirrors, Microelectromechanical systems, LIDAR, 3D scanning, Laser scanners, Micromirrors, Distance measurement, Silicon, Optical components

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Proceedings Article | 18 February 2010 Paper

Large aperture MEMS scanner module for 3D distance measurement

Thilo Sandner, Michael Wildenhain, Christian Gerwig, Harald Schenk, Sfefan Schwarzer, Harald Wölfelschneider

Proceedings Volume 7594, 75940D (2010) https://doi.org/10.1117/12.844926

KEYWORDS: Scanners, Mirrors, Microelectromechanical systems, LIDAR, 3D scanning, Laser scanners, Distance measurement, Optical components, Sensors, Receivers

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Proceedings Article | 17 February 2010 Paper

Optical position feedback and phase control of MOEMS scanner mirrors

A. Tortschanoff, M. Lenzhofer, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, A. Kenda

Proceedings Volume 7594, 75940K (2010) https://doi.org/10.1117/12.840629

KEYWORDS: Mirrors, Microopto electromechanical systems, Diodes, Temperature metrology, Electronics, Scanners, Feedback control, Control systems, Phase measurement, Optical sensing

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Proceedings Article | 17 February 2010 Paper

MEMS devices for laser camera systems for endoscopic applications

Christian Drabe, Richard James, Harald Schenk, Thilo Sandner

Proceedings Volume 7594, 759404 (2010) https://doi.org/10.1117/12.846855

KEYWORDS: Mirrors, Imaging systems, Cameras, Microelectromechanical systems, Photography, Laser applications, Video, Scanners, Laser systems engineering, Control systems

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Proceedings Article | 19 May 2009 Paper

Aluminium nitride: a promising and full CMOS compatible piezoelectric material for MOEMS applications

Holger Conrad, Jan Uwe Schmidt, Wolfram Pufe, Fabian Zimmer, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 7362, 73620J (2009) https://doi.org/10.1117/12.821715

KEYWORDS: Aluminum nitride, Silicon, Semiconducting wafers, Thin films, Sputter deposition, Finite element methods, X-ray diffraction, Microopto electromechanical systems, Crystals, Diffraction

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Proceedings Article | 19 May 2009 Paper

Position encoding and closed loop control of MOEMS translatory actuators

M. Lenzhofer, A. Tortschanoff, A. Frank, T. Sandner, H. Schenk, M. Kraft, A. Kenda

Proceedings Volume 7362, 736212 (2009) https://doi.org/10.1117/12.820335

KEYWORDS: Mirrors, Microopto electromechanical systems, Signal detection, Control systems, Interferometers, FT-IR spectroscopy, Spectrometers, Modulation, Sensors, Analog electronics

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Proceedings Article | 29 April 2009 Paper

Large stroke MOEMS actuators for optical path length modulation in miniaturized FTIR spectrometers

Thilo Sandner, Christian Drabe, Harald Schenk, Andreas Kenda

Proceedings Volume 7319, 73190H (2009) https://doi.org/10.1117/12.818605

KEYWORDS: Microopto electromechanical systems, Mirrors, FT-IR spectroscopy, Protactinium, Spectroscopy, Actuators, Spectral resolution, Infrared spectroscopy, Modulation, Packaging

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Proceedings Article | 29 April 2009 Paper

Improved MOEMS-based ultra-rapid Fourier transform infrared spectrometer

A. Tortschanoff, A. Kenda, M. Kraft, T. Sandner, H. Schenk, W. Scherf

Proceedings Volume 7319, 73190I (2009) https://doi.org/10.1117/12.818646

KEYWORDS: Mirrors, Microopto electromechanical systems, FT-IR spectroscopy, Spectroscopy, Infrared spectroscopy, Infrared sensors, Sensors, Signal to noise ratio, Actuators, Infrared radiation

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Proceedings Article | 24 February 2009 Paper

Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement

D. Jung, D. Kallweit, T. Sandner, H. Conrad, H. Schenk, H. Lakner

Proceedings Volume 7208, 72080A (2009) https://doi.org/10.1117/12.808210

KEYWORDS: Semiconducting wafers, Electrodes, Mirrors, Scalable video coding, Adhesives, Solids, Oxides, Silicon, Aluminum, Etching

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Proceedings Article | 19 February 2009 Paper

Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer

Jan Grahmann, Holger Conrad, Thilo Sandner, Thomas Klose, Harald Schenk

Proceedings Volume 7208, 720808 (2009) https://doi.org/10.1117/12.808151

KEYWORDS: Mirrors, Sensors, Micromirrors, Resistance, Transformers, Piezoresistive sensors, Position sensors, Silicon, Bridges, Wheatstone bridges

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SPIE Journal Paper | 1 April 2008

Translatory MEMS actuators for optical path length modulation in miniaturized Fourier-transform infrared spectrometers

Thilo Sandner, Christian Drabe, Harald Schenk, Andreas Kenda, Werner Scherf

JM3, Vol. 7, Issue 02, 021006, (April 2008) https://doi.org/10.1117/12.10.1117/1.2945227

KEYWORDS: Mirrors, FT-IR spectroscopy, Microopto electromechanical systems, Protactinium, Spectrometers, Actuators, Infrared radiation, Microelectromechanical systems, Spectral resolution, Signal to noise ratio

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Proceedings Article | 22 January 2007 Paper

Investigation and characterization of high-efficient NIR-scanning gratings used in NIR micro-spectrometer

F. Zimmer, A. Heberer, Th. Sandner, H. Grueger, H. Schenk, H. Lakner, A. Kenda, W. Scherf

Proceedings Volume 6466, 646605 (2007) https://doi.org/10.1117/12.701821

KEYWORDS: Mirrors, Spectroscopy, Etching, Diffraction gratings, Diodes, Silicon, Control systems, Oxides, Scanning electron microscopy, Signal processing

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Proceedings Article | 22 January 2007 Paper

Miniaturized FTIR-spectrometer based on an optical MEMS translatory actuator

Thilo Sandner, Andreas Kenda, Christian Drabe, Harald Schenk, Werner Scherf

Proceedings Volume 6466, 646602 (2007) https://doi.org/10.1117/12.697898

KEYWORDS: Mirrors, Microopto electromechanical systems, FT-IR spectroscopy, Protactinium, Spectroscopy, Actuators, Infrared radiation, Micromirrors, Infrared spectroscopy, Signal processing

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Proceedings Article | 23 January 2006 Paper

Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Minghong Yang, Alexandre Gatto, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 6114, 61140H (2006) https://doi.org/10.1117/12.644626

KEYWORDS: Aluminum, Reflectivity, Silver, Mirrors, Optical coatings, Micromirrors, Gold, Laser damage threshold, Dielectrics, Microopto electromechanical systems

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Proceedings Article | 23 January 2006 Paper

Extended damping model for out-of-plane comb driven micromirrors

Thomas Klose, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 61140J (2006) https://doi.org/10.1117/12.645981

KEYWORDS: Electrodes, Finite element methods, Micromirrors, 3D modeling, Capacitance, Mirrors, Electroluminescence, Data modeling, Microsystems, Microelectromechanical systems

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Proceedings Article | 23 January 2006 Paper

Development of high-efficient NIR-scanning gratings for spectroscopic applications

F. Zimmer, H. Grueger, A. Heberer, Th. Sandner, H. Schenk, H. Lakner, A. Kenda, W. Scherf

Proceedings Volume 6114, 611407 (2006) https://doi.org/10.1117/12.644481

KEYWORDS: Mirrors, Etching, Silicon, Diffraction gratings, Spectroscopy, Micromirrors, Anisotropic etching, Wet etching, Aluminum, Diffraction

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Proceedings Article | 5 October 2005 Paper

VUV optical coatings for the next-generation micro-mechanical mirrors

Minghong Yang, Alexandre Gatto, Norbert Kaiser, Jan Uwe Schmidt, Thilo Sandner, Jörg Heber, Harald Schenk, Hubert Lakner

Proceedings Volume 5963, 596322 (2005) https://doi.org/10.1117/12.625138

KEYWORDS: Aluminum, Mirrors, Vacuum ultraviolet, Coating, Reflectivity, Micromirrors, Optical coatings, Spatial light modulators, Oxides, Dielectrics

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Proceedings Article | 5 October 2005 Paper

Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region

Thilo Sandner, Jan Uwe Schmidt, Harald Schenk, Hubert Lakner, Minghong Yang, Alexandre Gatto, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 5963, 596314 (2005) https://doi.org/10.1117/12.625246

KEYWORDS: Reflectivity, Aluminum, Mirrors, Silver, Micromirrors, Thin film coatings, Optical coatings, Laser damage threshold, Radium, Dielectrics

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Proceedings Article | 1 August 2005 Paper

Scanning micro-mirrors: from bar-code scanning to spectroscopy

F. Zimmer, H. Grueger, A. Heberer, T. Sandner, A. Wolter, H. Schenk

Proceedings Volume 5873, (2005) https://doi.org/10.1117/12.614895

KEYWORDS: Mirrors, Micromirrors, Silicon, Aluminum, Spectroscopy, Reflectivity, Oxides, Etching, Diffraction, Diffraction gratings

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Proceedings Article | 22 January 2005 Paper

Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Alexandre Gatto, Minghong Yang, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590522

KEYWORDS: Mirrors, Aluminum, Micromirrors, Deep ultraviolet, Reflectivity, Coating, Spatial light modulators, Vacuum ultraviolet, Multilayers, Silicon

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Proceedings Article | 22 January 2005 Paper

Micromechanical scanning mirrors with highly reflective NIR coatings for high-power applications

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Stefan Braun, Thomas Foltyn, Andreas Leson, Alexandre Gatto, Minghong Yang, Norbert Kaiser

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590448

KEYWORDS: Reflectivity, Aluminum, Near infrared, Mirrors, Optical coatings, Silver, Absorption, Dielectrics, Multilayers, Microopto electromechanical systems

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Proceedings Article | 16 August 2004 Paper

Damping analysis and measurement for a comb-drive scanning mirror

Thilo Sandner, Thomas Klose, Alexander Wolter, Harald Schenk, Hubert Lakner, Wyatt Davis

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.550529

KEYWORDS: Mirrors, Electrodes, Micromirrors, Scanners, Microelectromechanical systems, Motion models, Microfluidics, Crystals, Silicon, Capacitance

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Proceedings Article | 22 July 2003 Paper

Determination of polarization profiles inside ferroelectric thin films using the laser intensity modulation method

Gerald Gerlach, Thilo Sandner, Gunnar Suchaneck

Proceedings Volume 5045, (2003) https://doi.org/10.1117/12.483784

KEYWORDS: Polarization, Thin films, Thermal modeling, Modulation, Data modeling, Ferroelectric materials, Electrodes, Silicon, Mathematical modeling, Nickel

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MOEMS and Miniaturized Systems XXIV

27 January 2025 | San Francisco, California, United States

MOEMS and Miniaturized Systems XXIII

29 January 2024 | San Francisco, California, United States

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