Diabetes is a serious health condition considered to be one of the major healthcare epidemics of modern era. An effective treatment of this disease can be only achieved by reliable continuous information on blood glucose levels. In this work we present a minimally invasive, chip-based near infrared (NIR) sensor, combined with microdialysis, for continuous glucose monitoring (CGM). The sensor principle is based on difference absorption spectroscopy in the 1st overtone band of the near infrared spectrum. The device features a multi-emitter LED and InGaAs-Photodiodes, which are located on a single electronic board (non-disposable part), connected to a personal computer via Bluetooth. The disposable part consists of a chip containing the fluidic connections for microdialysis, two fluidic channels acting as optical transmission cells and total internally reflecting mirrors for in- and out-coupling of the LED light to the chip and to the detectors. The sensor is combined with an intraveneous microdialysis to separate the glucose from the cells and proteins in the blood and operates without any chemical consumption. In vitro measurements showed a linear relationship between glucose concentration and the integrated difference signal with a coefficient of determination of 99 % in the relevant physiological concentration range from 0 to 400 mg/dl. In vivo measurements on 10 patients showed that the NIR-CGM sensor data reflects the blood reference values adequately, if a proper calibration and signal drift compensation is applied. The MARE (mean absolute relative error) value taken over all patient data is 13.8 %. The best achieved MARE value is at 4.8 %, whereas the worst is 25.8 %, with a standard deviation of 5.5 %.
KEYWORDS: Glucose, Sensors, Light sources, Light emitting diodes, Spectroscopy, Absorbance, Near infrared, Microfluidics, Absorption, Signal to noise ratio
Assessment of glycaemia in diabetes is crucially important for prevention of both, acute and long term complications.
Continuous glucose monitoring (CGM) is certainly the most appropriate way for optimizing the glycaemic control, since
it prevents or delays the progression of complications associated with hypo- or hyperglycaemic events, reducing
morbidity, mortality, and overall costs in health care systems. In this paper we describe the concept and first in vitro
results of a minimally invasive, chip-based NIR-Sensor for continuous glucose monitoring. The sensor concept is based
on difference infrared absorption spectroscopy, which was evaluated within laboratory measurements of D+-Glucose
dissolved in water. The laboratory measurements revealed a linear relationship between glucose concentration and the
integrated difference spectroscopy signal with a coefficient of determination of 99.6% in the concentration range of 0-
500 mg/dL. Suitable wavelength bands were identified in which the correlation is preserved and commercial light
sources are available for realisation of a spectrometer-less, integrated NIR-sensor. In the designed sensor the component
area (non-disposable) is separated from the detection area (disposable, low-cost). The disposable part of the sensor is
fluidically connected to a micro-dialyses needle, accessing glucose subcutaneously via the ISF (interstitial fluid) or
intravascularly. The non-disposable part contains all the optical elements, like LED´s and photo-detectors. The in- and
out-coupling of the optical signal is achieved across the plane of the chip by using total internal reflection on mirrors
integrated into the fluidic chip. The glucose is continuously measured by considering the difference signals of light at the
corresponding wavelengths, as a function of time or in defined intervals if the light sources are modulated. The in-vitro
measurements show an absolute error of about 5 mg/dL with a relative error of 5% for glucose concentrations larger than
50 mg/dL and about 12 % in the hypoglycemic range (<50 mg /dL).
Nano-structured surfaces were generated by laser interference lithography and femtosecond-laser direct writing of photo
resists that subsequently were metallized by electroless plating or sputter deposition of silver. Laser lithography was
performed with a 405 nm coherent diode laser in AZ9260, using two-beam interference with double illumination by 90°
rotating of the substrate, leading to 2D periodic surface patterns with smallest features of the order of 200 nm. With fs-laser
direct writing using a Ti-sapphire oscillator of 800 nm and 15 fs pulse length, feature sizes down to 100 nm were
realized in SU8, even with aspect ratios much larger than 1. Metallization with electroless plating delivered either grainy
silver coatings with a grain size around 100 nm or needle-like silver coatings with a needle length around 100 nm and a
width of around 10 nm. The metallized substrates were exposed to aqueous solutions of Rhodamine 6G (Rh6G) of
different concentrations and the corresponding Raman signals were recorded with a Raman micro-probe spectrometer.
The nano-structured surfaces lead to formation of Raman bands attributable to Rh6G. In case of the grainy silver
coatings, surfaces without nano-structures did not show Raman activity, indicating that grating-coupled surface plasmons
play the dominant role for Raman enhancement. In case of substrates coated with the needle-shaped silver crystallites,
Raman activity was also seen in regions without laser-generated nano-structures, indicating that localized particle
plasmons play the dominant role for Raman enhancement. A comparison with Raman spectra measured with
conventional Raman spectrometer showed that the enhancement factor achieved by the laser-generated nano-structures
themself, is of the order of 6×104. Raman intensity as a function of Rh6G concentration revealed a regular behaviour, as
expected from a Langmuir isotherm.
The chemical and physical condition of oils in marine engines must be monitored to ensure optimum performance of the
engine and to avoid damage by degraded oil not adequately lubricating the engine. Routine monitoring requires
expensive laboratory testing and highly skilled analysts. This work describes the adaptation and implementation of a mid
infrared (MIR) sensor module for continued oil condition monitoring in two-stroke and four-stroke diesel engines. The
developed sensor module will help to reduce costs in oil analysis by eliminating the need to collect and send samples to a
laboratory for analysis. The online MIR-Sensor module measures the contamination of oil with water, soot, as well as the
degradation indicated by the TBN (Total Base Number) value. For the analysis of water, TBN, and soot in marine engine
oils, four spectral regions of interest have been identified. The optical absorption in these bands correlating with the
contaminations is measured simultaneously by using a four-field thermopile detector, combined with appropriate bandpass
filters. Recording of the MIR-absorption was performed in a transmission mode using a flow-through cell with
appropriate path length. Since in this case no spectrometer is required, the sensor including the light source, the flowthrough-
cell, and the detector can be realised at low cost and in a very compact manner. The optical configuration of the
sensor with minimal component number and signal intensity optimisation at the four-field detector was implemented by
using non-sequential ray tracing simulation. The used calibration model was robust enough to predict accurately the
value for soot, water, and TBN concentration for two-stroke and four-stroke engine oils. The sensor device is designed
for direct installation on the host engine or machine and, therefore, becoming an integral part of the lubrication system. It
can also be used as a portable stand-alone system for machine fluid analysis in the field.
Micro-lenses, including Fresnel-Lenses, were fabricated by excimer laser ablation of polymers by means of lasergenerated
grey-tone-masks. The smallest reproducible holes that could be fabricated by excimer laser ablation (193 nm,
1 J/cm2) of chromium-on-quartz (thickness 50-100 nm) were around 3 μm, the pitch of which should be at least at the
same value to ensure a reproducibility of hole-arrays. To achieve acceptable ablation times during the fabrication of the
grey-tone-masks, on-the-fly ablation instead of step-and-repeat technique was used, operating the laser at a constant
pulse repetition rate <30 Hz with a continuously moving quartz-substrate. In this way and using different encoding
techniques it was possible to generate at least 11 different grey-tones. The available grey-tones were used to generate
grey-tone-masks for ablation of Polymethylmethacrylate (PMMA) and Polycarbonate (PC). For that, fluences in the
range of 0.07-0.14 J/cm2 could be applied, corresponding to a value of 1.25 J/cm2 on the workpiece without grey-tonemask
and a value lying well below the damage threshold of the chromium mask. Refractive micro-lenses fabricated in
this way did not show a good imaging quality, since 11 grey-tones is less than required to generate a continuous surface
profile over the full diameter of the lens during ablation and the achievable aspect ratio is limited with the small
fluences. However, flat diffractive micro-lenses of the Fresenel type with a quasi-continuously surface profile could be
fabricated in a sufficient manner. This can be attributed to the fact that each segment of the Fresenel-lenses can be
encoded by 11 grey-tones, leading to much smoother surface reliefs and to a sufficient imaging quality.
Direct laser writing via two-photon absorption allows the fabrication of three-dimensional dielectric structures with submicron
resolution by tightly focusing ultrashort laser pulses into a photo-sensitive material with a high-resolution
microscope objective and scanning the laser focus relative to the material. Woodpile photonic crystals fabricated with
this method show a characteristic dip in transmission at near-infrared wavelengths. The spectral position of this
transmission dip scales with the grating period of the fabricated crystals. Metallo-dielectric structures can be obtained by
first fabricating dielectric templates with direct laser writing and subsequently coating the templates with a thin
conformal metal film by electroless plating. Contiguous and conducting silver films can be deposited even on convoluted
3D geometries.
A robust optical sensor for liquid control in fluidic channels is reported. The sensor operates on light intensity
modulation resulting from alteration of total internal reflection into partial reflection. When a liquid guided in a channel
covers an integrated prism, the total internal reflection is changed into a partial reflection, resulting in an intensity
modulation of the reflected light. The set-up comprises a fibre which is built in a coupler unit with integrated LED and
photodiode as well as a prism micro-machined directly into a micro-fluidic polymeric channel by laser ablation. The
Prism is of 45-90-45° type with a dimension of 0.5 mm × 1 mm × 2 mm. In this design the radiation of the LED light
source is transmitted and collected from the prism by a 50:50 fibre coupler by means of total or partial internal reflection.
The sensor was characterised by filling alternately the channel with water and air. The influence of stray light onto the
sensor signal was tested by applying a strong uncollimated illumination of the channel. Only a small increase in the
output signal level in the presence of air but a strong increase in case of the presence of water could be detected.
A robust optical sensor for liquid control in fluidic channels is reported. The sensor operates on light intensity
modulation resulting from alteration of total internal reflection into partial reflection. When a liquid guided in a channel
covers an integrated prism, the total internal reflection is changed into a partial reflection, resulting in an intensity
modulation of the reflected light.
The set-up comprises a fibre which is built in a coupler unit with integrated LED and photodiode as well as a prism
micro-machined directly into a micro-fluidic polymeric channel by laser ablation. The Prism is of 45-90-45° type with a
dimension of 0.5 mm × 1 mm × 2 mm. In this design the radiation of the LED light source is transmitted and collected
from the prism by a 50:50 fibre coupler by means of total or partial internal reflection.
The sensor was characterised by filling alternately the channel with water and air. The signal level for the liquid in
contact with the prism was determined to be 222 mV while the signal level of the air filled channel was 336 mV. The
influence of stray light onto the sensor signal was tested by applying a strong uncollimated illumination of the channel.
Only a small increase in the output signal level in the presence of air but a strong increase in case of the presence of
water could be detected. However, the discrimination between air and liquid was still possible sufficiently (290 mV for
liquid, 340 mV for air). The sensor was also demonstrated to be operated as a micro-refractometer.
The interference of three coherent laser beams of a HeCd-laser with a wavelength of 325 nm was used to create a
periodic intensity distribution into the photo-resist AZ4562. The beam configuration for the laser beam interference was
carefully chosen, so that well defined patterns of two-dimensional periodicity were generated in the photo-resist.
Moulding tools were fabricated from the generated nano-structures via electroforming processes, allowing for a fast
replication of the nano-structured surfaces via hot embossing. Hot embossed polymers were used to increase the
effective surface of micro-fluidic devices like e.g. Polymerase-Chain-Reaction(PCR)-chips. The Nano-structured
surfaces were characterized concerning their contact angles when wetted with de-ionized water. It was found that the
nano-structures influenced the wetting behaviour of micro-fluidic chip surfaces clearly, especially Polypropylene (PP)
surfaces showed a superhydrophobic behaviour.
Laser transmission welding in recent years has been established as a versatile method for interconnection of thermoplastics, at least for macroscopic parts. The technology also offers interesting possibilities for packaging of transparent, micro-structured polymer chips, as used for life science or biotechnology applications. A method for transmission welding, based on a diode laser bar in combination with a thin layer of IR-absorbing dye, is introduced, that allows for fast, mask-less welding of two thermoplastic substrates, at least one of which contains micro structures. The process strongly depends on the ratio of the IR-absorbing dye layer thickness to the depth of the microstructures and should be <<1. Detailed results of the absorption of the dye layers as a function of the spin coating parameters used for preparation of the films are presented, including depth profile analysis. It is demonstrated that the formation of good quality weld seams mainly depends on the energy per unit length coupled to the substrate, which is adjustable by the feed rate and the laser power applied. As an example the process window for welding CGE chips made of PMMA, containing 50 μm wide and deep channels, separated by 100 μm wide webs is shown. The applicability of the technology to other polymer chip geometries together with concepts for further improvement is demonstrated.
Due to the potential of high data rates up to several Gb/s, low electromagnetic interference sensitivity and weight reduction capabilities, in future, optical data transmission will become standard in airplanes. The requirements on the necessary optical components that have to be operated in airborne environment in general are extremely high. In addition, airframe manufacturers are interested in low cost components. An example for such an optical component is a star coupler for data distribution, in particular, a device made on base of polymers. The applicability of such 4x4 polymer star couplers under extreme environmental conditions was investigated. The investigations were made at temperatures from -40 to +80 °C and up to 98 % humidity. Different types of housings were tested (polymer, metal, ceramic). It was found that housing of the polymer couplers is required necessarily, since non-housed components exhibit a large insertion loss increase of up to 0.5 dB during temperature variation. Best results were achieved with metal or ceramic housings exhibiting a maximum insertion loss increase of approximately 0.1 dB. However, due to a large difference of thermal expansion coefficients of filling and housing material, respectively, ceramic housings mechanically failed (crack formation) and thus metal housings are first choice. The results were also compared to those achieved for commercial 4x4 multimode couplers made of glass and based on fused bi-conical taper technology.
In future airplanes optical data networks are expected to be state of the art. The advantages of optical technology compared to wire-based systems are higher data rates, smaller sensitivity against electromagnetic interference (EMI) and less weight. Today avionics full duplex switched ethernet (AFDX) is realised on duplex copper wires connecting two switches. An optical version of AFDX could be realised on a simplex fibre, using a two-wavelength transmission over one fibre. This would require a wavelength selective coupler, allowing a bi-directional data transmission with two wavelengths. In this work a simple WDM module is introduced, based on the principle of a micro-optical bench made of a polymer with hybrid integration of lenses and filters and allowing both multiplexing as well as de-multiplexing of wavelengths 850 nm and 1310 nm. Two different designs have been realised, one with ball lenses and one with GRIN lenses, both using edge filters for wavelength separation. The fabrication and optical performance of such couplers is described and discussed.
The proposed pixel matrix display consists of two plastic elements: a planar waveguide which plays the role of a light reservoir and a deformable thin membrane with a matrix of pillars. On the bottom side of the membrane that touches the light reservoir there is an electrode surrounding all pillars and leaving tops of pillars transparent. The light reservoir has a matrix of individual electrical contacts so that the display can be addressed pixel by pixel and switched on by applying a voltage to the electrical contacts on the light reservoir and the membrane electrode. The electrostatic force locally deforms the membrane and puts the pillars in contact with the light reservoir, therefore, coupling light into the membrane. A demonstrator of a polymer-based pixel matrix display is fabricated in MOEMS technology. The proof-of-principle experiment is made on a 20x20 pixel matrix with an active display matrix area of 5x5 mm2, a light emitting diode illumination and 80 V applied to address pixels.
Very small point sensors for fluid pressure have extensive applications in aerodynamics and medical monitoring. We describe Fabry-Perot pressure sensors formed by laser machining of the end faces of single mode conventional and multicore fibers.
Plastic optical fibers (POF) continuously gained its importance during the last decade, since they are widely used in automotive applications for optical data communications (for e.g. MOST). The application of POF for in-flight-entertainment (IFE) optical networks in civil aircraft cabin areas is currently under investigation. Since it is expected that the optical networks will develop from a point-to-point network architecture to more complicated structures there will be a need for optical couplers distributing the signals to different suppliers. Typical applications would be for e.g. the distribution of optical data to IFE implemented within single seats of a seat row of an airplane. Within this work the fabrication of an optical 1x2 POF coupler by the Laser-LIGA technique is demonstrated. The Laser-LIGA technique compared to standard X-ray lithography is simpler and more cost effective. Moreover, the Laser ablation technique also allows rapid prototyping of the same structures. The POF couplers fabricated by this technology show insertion loss values down to about 5.6 dB, depending on the waveguide core material and exhibit good uniformity values in the order of 0.1 dB.
Moulding of plastics enables optical features to be integrated into a single unit. This is particularly an advantage for product designs that impose space and weight constraints. Therefore, the use of plastic for biomedical and non telecommunications orientated optical applications continues to grow as design engineers take advantage of the ease of fabrication and the material flexibility.
Deep X-ray LIGA presents itself as a method ideally suited for the production of moulds for the manufacture of plastic microcomponents. LIGA is synonymous for the lithography preferably carried out with synchrotron radiation X-rays, although many other lithography and non-lithography methods for master production have been developed in the last few years. Nevertheless, the exceptional resist heights, the enormous accuracy and low runout as well as the low sidewall roughnesses cannot be copied by these other methods of master production. In particular, the low sidewall roughnesses achieved through deep X-ray LIGA is essential for the manufacture of waveguide coupling systems based on polymers. The design and conceptualisation of such waveguides systems is presented here. In addition however, the exceptional resist heights and low runout can be employed to produce passive structures for the packaging of optical components.
This paper provides an overview of the deep X-ray LIGA technology, emphasizing its strengths and application areas. Considerations for the design and manufacture of the plastic structures are also elucidated.
Excimer laser ablation of polymers is demonstrated to be a well suited technology for cost effective fabrication of prototypes of polymer microstructures in relatively short times. Prototyping is realized by ArF excimer laser ablation (193 nm) using mask projection techniques in combination with high precision sample movement as well as mask movement. Different techniques and their restrictions in structural diversity are illustrated by examples from micro-optics, like fiber switches and waveguide couplers. Microparts the functionality of which has been proven by prototypes can be fabricated in large numbers by the Laser-LIGA technique. For the Laser-LIGA process a master structure is generated in PMMA that is coated onto a titanium wafer, using the same CNC data as for rapid prototyping without additional expenditure. From the PMMA master a mould insert of Ni or Cu can be generated by electroforming that allows time and cost effective mass fabrication via hot embossing or injection moulding if the required part numbers are large. Advantages and disadvantages of the laser ablation prototyping technique compared to other rapid prototyping methods are discussed and the Laser-LIGA technique is compared to the standard LIGA process using deep X-ray lithography.
The deposition of different hard ceramics coatings as Al2O3, ZrO2, c-BN and DLC thin films by pulsed laser deposition (PLD) has been of increasing interest as alternative process compared to the latest progress in CVD and PVD deposition. For instance, in pulsed laser deposition, the properties of the resulting thin films are influenced by the composition, ionization state, density, kinetic and excitation energies of the particles of the vapor/plasma. In order to deposit hard ceramics with different properties and applications, various substrates as Pt/Ti/Si multilayer, glass (fused silica), steel, polymethylmethacrylate (PMMA), polycarbonate (PC), Si(100) and Si(111) are used. These thin films are deposited either by excimer laser radiation ((lambda) equals 248 nm) or by CO2 laser radiation ((lambda) equals 10.6 micrometers ). To characterize the structural, optical and mechanical properties of the hard ceramics thin films, different techniques as Raman spectroscopy, ellipsometry, FTIR spectroscopy and nanoindentation are used.
Excimer laser ablation was used for direct writing of multimode waveguide structures with passive fiber alignment grooves in polymers. First, integrated optical multimode components were simulated by the method of beam propagation to optimize the optical performance of the design. Then the CNC codes for laser machining were created directly from the corresponding CAD data. ArF Excimer laser radiation of wavelength (lambda) equals 193 nm was used for ablation of adjacent grooves with a cross sectional area of 50 X 50 micrometers 2 and lengths in the order of several mm. The laser-written grooves were filled with a liquid pre-polymer which after UV-curing served as the waveguiding structures. The smoothest surfaces during laser ablation were achieved by applying several ablation scans with reduced material removal rates but higher feedrates. Debris formation, also influencing the surface roughness, was suppressed or minimized by making use of capable polymers. With the method of laser ablation linear waveguides of length 1 equals 10 mm with insertion losses Li in the rang of 1.3 to 1.9 dB have been realized for (lambda) equals 1310 nm, depending on the polymer used. By means of 1 X 2-splitters, 4 X 4 as well as 4 X 16 starcouplers it was shown that laser ablation is a well suited tool for rapid prototyping of integrated optical multimode elements.
Raman spectroscopy is employed for structural characterization of BaTiO3 ferroelectric thin films, deposited by a hybrid DC-field enhanced pulsed laser deposition process. Pulsed excimer laser radiation (KrF, (lambda) equals 248 nm, (tau) equals 25 ns) is used for material removal from a sintered BaTiO3-target in an O2 processing gas atmosphere (pressure p(O2) approximately equals 1 * 10-1 mbar) with subsequent deposition on a substrate. Additional energy is supplied to the laser- induced plasma via a system of two concentric ring electrodes lying on different electric potentials (difference (Delta) V up to several hundred V), leading to further activation of the plasma and ignition of a DC- discharge in the processing gas atmosphere. Micro-Raman spectroscopy is performed with Ar+ laser radiation ((lambda) equals 488 nm), using a microscope unit to achieve a high spatial resolution in the range of 1 micrometers . The Raman spectra of the BaTiO2 films show peaks typical for the tetragonal/cubic Perovskite structure. Polarization- dependent measurements reveal a mean c-axis orientation normal to the substrate surface, regardless whether a DC- field is applied or not. Using low DC-bias voltages ((Delta) V equals 50 V) allows lowering the substrate temperature without affecting the crystal quality of the films, as determined from the full width at half maximum of the Raman peaks, which is a measure for the crystal quality. High DC-bias voltages ((Delta) V equals 700 V), however, lead to amorphous films. The dielectric constant of the BaTiO3 films is strongly correlated to the crystal quality.
Pulsed laser deposition with KrF-excimer laser radiation ((lambda) equals 248 nm, (tau) equals 25 ns) is used to grow thin films of diamond-like carbon (DLC) on Si substrates by material removal from a graphite target in vacuum (10-5 - 10-4 mbar) or in processing gas atmospheres (He, Ne, Ar, Kr, p approximately equals 10-2 mbar). Additional ion bombardment is performed by extracting inert gas ions from a low pressure rf gas discharge which is ignited in the deposition chamber. Raman spectroscopy reveals that the sp3-content of the DLC films depends on the fluence of the laser radiation on the target, the substrate temperature and processing gas pressure. Especially the applied laser fluence and the inert gas pressure strongly influence the energy of the film-forming particles and therefore the relative amounts of sp2 and sp3 bonds in the films. Using additional ion bombardment from the low pressure gas discharge leads to more nanoclustered films in the case of higher ion masses due to a more effective defect creation. However, the films are predominantly sp2-bonded, caused by substrate heating due to dissipation of electric energy at the substrate electrode.
Sintered targets of ZrO2, Al2O3 and BaTiO2 are ablated by KrF excimer laser radiation (lambda) equals 248 nm, (tau) equals 25 ns. The processing gas atmosphere consists of O2 at typical pressures of 10-3-0.5 mbar. The films are deposited on a Pt/Ti/Si multilayer substrate. The investigations concentrate on the influence of the kinetic energy of the ablated particles on the crystal structure and morphology of the forming films. The kinetic energy is described as a function of the processing gas pressure, the target-to-substrate distance and the fluence of the laser radiation on the target. The compaction of the zirconia and alumina thin films is achieved by particles impinging on the growing surface with kinetic energies above 30 eV. To deposit ferroelectric BaTiO3 thin films at low substrate temperatures the mean kinetic energy of the Ba particles have to be < 30 eV to prevent displacements beneath the film surface. Analytical techniques used for the structural characterization of the films are X-ray diffraction, micro- Raman spectroscopy and electron microscopy. Dielectric and ferroelectric properties of the films are determined by impedance measurements. The thickness and the complex refractive index are determined by fitting a model for the film geometry to the measured ellipsometry data.
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